The Hiden ESPion probe can be used for regular monitoring of I-V plasma characteristic, which provides direct data relating to plasma reproducibility and stability.
Automatic real-time extrapolation of plasma parameters provides comprehensive data on plasma properties, which can then be used in characterisation and uniformity monitoring.
The standard plasma analysis models of the ESPion system are the orbital motion limited (OML) and Allen Boyd Reynolds (ABR).
Spatially resolved measurements are enabled across the plasma volume by the Hiden automatic Z-drive. The standard Z-drive translation options are: 300, 600 and 900mm.
The main features of the ESPion are listed below:
- 15 scans/sec acquisition rate with D-O-E interface for auto, semi or manual analyses
- 4.25MOhm at 13.56 MHz cf. 100kOhm
- Gas cooled multi-inductor chain for high temperature plasma operation
- Gas cooled multi-inductor chain can be replaced by the user for tuning to other frequencies
- Reference probe compensates for low frequency effects e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply)
- Highest blocking impedance of any commercially available unit
- Fastest pulsed plasma specifications of any commercial probe
- Contains all necessary gating circuitry as standard
- Interlocked isolation valve, 90° probes, combined linear – rotary drives options available
- Self-cleaning cycle to limit probe tip contamination
- 300, 600 or 915mm auto linear drive options
- ESPsoft control via RS232, RS485 or Ethernet LAN
The main applications of the ESPion are listed below:
- Floating potential
- Electron temperature
- Ion flux
- Ion density
- Plasma potential
- Plasma characterisation
- Electron energy distribution