The Hiden ESPion system provides instant, automatic plasma parameter acquisition, revealing comprehensive data for plasma characterization purposes, such as:
- Electron Energy Distribution Function (EEDF)
- Plasma Potential
- Electron Density
- Ion Flux
- Electron Temperature
- Ion Density
Both the Allen Boyd Reynolds (ABR) and Orbital Motion Limited (OML) standard plasma analysis models are used by Hiden’s ESPionsoft automatic analysis software to achieve highly accurate results.
Measurements are spatially resolved across the plasma volume, made possible with the Hiden Z-drive option. The standard Z-drive translation options are: 300, 600, and 900 mm.
Key Features
- The reference probe corrects for low frequency effects, such as noise (from the power supply) or shifts in the plasma potential (from anodized chamber walls)
- ESPion provides the fastest pulsed plasma specifications and the highest blocking impedance of any commercial probe
- ESPionSoft has all required gating circuitry
- 300, 600, or 915 mm auto linear drive options
- Interlocked isolation valve, 90 ° probes, combined linear-rotary drive options available
- Self-cleaning cycle prevents probe tip contamination
- ESPionSoft control via RS232, RS485, or Ethernet LAN
- The acquisition rate is 15 scans per second with a D-O-E interface for automatic, semi-automatic, or manual analysis
- Hiden is a pioneer of passive RF compensation
- 4.25 MOhm at 13.56 MHz cf. 100 kOhm
- Gas-cooled multi-inductor chain for high-temperature plasma operations
- The gas-cooled multi-inductor chain can be replaced to tune to other frequencies.
Applications
- HiPIMS
- Diamond-Like Carbon (DLC) Coating
- Pulsed Laser Deposition (PLD) Coatings
- Plasma Characterization
- Plasma Etching ALE
- DC Magnetron Deposition of SiBCN Films.