The Hiden AutoSIMS is a self-contained, automated, SIMS tool designed to perform routine and repetitive surface analysis. It is perfect for the measurement of thin films, contamination and doping from the top monolayer to many microns in both insulating and conductive material.

The samples are loaded into the Hiden AutoSIMS via a modular cassette sample holder and positioned using the computer driven high precision stage. The ion gun and analysis recipes that are stored in the system will run the tool in 100 % automatic mode, reporting results in either spreadsheet or custom formats. The long-life oxygen ion gun provides a steady beam for the whole working day – and night, providing surface spectra and 3D depth profiles. Analysis position and recipe can also be established using a simple spreadsheet, allowing the non-skilled user to complete an intricate experimental matrix with ease.

Although the tool is engineered to be operated by non-specialist technicians, the complete range of SIMS parameters are available to more advanced users and the AutoSIMS can be used as a challenging research tool in its own right supplying unparalleled depth resolution and cost of ownership.


The AutoSIMS is applied in the following areas:

  • Coatings
  • Thin films
  • Surface modification
  • Repetitive analysis
  • Product monitoring
  • Multiple regions
  • Large areas


The key features of the AutoSIMS are as follows:

  • Large X-Y sample stage
  • 100% automated, unattended, SIMS analysis
  • Customizable cassette style sample holder
  • Oxygen ion gun for sensitive analysis
  • Nanometer depth resolution
  • Parameters can be specified via spreadsheet
  • Modular servicing for high up-time
  • 3D characterization


  • Hiden SIMS Software

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