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Collaboration Develops MEMS Micro-Mirror Device for Next Generation High Definition Displays

The Institute of Microelectronics (IME), a research institute of the Agency for Science, Technology and Research (A*STAR), and Silicon Quest, Inc., a US-based fab-less company, today announced their partnership in the development of a CMOS compatible high density array MEMS micro-mirror device for the next generation high definition display applications.

IME had previously collaborated with Silicon Quest on the development of a 1-megapixel MEMS micromirror array device integrated on CMOS substrate. During this collaboration, IME developed the technology platform for the vertical silicon-based hinges that support the micromirrors. These micromirrors form the image on a display screen by reflecting the incident light in a controlled manner with an applied voltage. These devices are intended for the use in digital projectors, viewfinders and exposure systems. The current collaboration aims to develop a 2-megapixel micromirror array device.

Professor Dim-Lee Kwong, Executive Director of IME, said "This project will take advantage of IME's vast experience and capabilities in MEMS processing and integration as well as advanced packaging to address the inherent challenges of monolithic integration of MEMS and CMOS." He continued, "Manufacturing of these devices are driven by cost concerns and IME will be developing 8" foundry compatible MEMS process for the devices designed by Silicon Quest to significantly reduce time-to-market."

Mr. Fred Ishii, President and CEO of Silicon Quest, said "The development team is able to develop a best performing micromirror using the simplest structure with a single vertical hinge and a mirror plate. The idea of a micromirror device with vertical hinge originated over half a century ago and the team was able to revive it with today's technology. Silicon Quest and IME have developed an excellent partnership. The effort and commitment put in by IME staff has been remarkable. The device is designed for cost-effective manufacturing and IME offers a very flexible and cost-effective approach with their expertise and state-of-the-art facility. Silicon Quest plans to commercialize the technology in the near future."

IME and Silicon Quest plan to embark on the development of the next generation world's smallest pixel micromirror arrays and partner with local semiconductor foundry and packaging company for technology transfer.

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