This pioneering study on van der Waals (vdW) epitaxy has created new opportunities for producing wafer-scale, single-crystal molecular films, addressing a long-standing challenge in semiconductor technology.
The team also addressed the Schwoebel-Ehrlich barrier, which enabled layer-by-layer growth and controlled coalescence of nuclei. These breakthroughs have facilitated the growth of single-crystal Sb2O3 films with precise thickness control, which is vital for scalable semiconductor applications.
The research team used ultrathin, highly oriented Sb2O3 films as gate dielectrics in MoS2-based field-effect transistors (FETs), leading to devices with improved performance. The enhanced dielectric quality of these Sb2O3 films resulted in an exceptionally low leakage current (~10-14 A) and an ideal van der Waals (vdW) interface with the channel material, both of which contributed to superior switching characteristics.
This configuration enabled the device to achieve a subthreshold swing close to the theoretical limit of 60 mV/dec, signifying highly efficient gate control. This achievement marks a significant breakthrough in controlling molecular alignment in vdW epitaxy, opening the door to the large-scale synthesis of 2D molecular crystals with high crystallinity—a crucial factor for future electronic and optoelectronic devices.
The study not only advances vdW epitaxy technology but also highlights the growing potential of molecular crystals for next-generation device applications, suggesting new directions in the development of high-performance 2D materials.
Journal Reference:
Liu, L., et al. (2024). Van der Waals epitaxial growth of single-crystal molecular film. National Science Review. doi.org/10.1093/nsr/nwae358.