In this interview, AZoMaterials speaks with Joel Kenyon, Head of Product Management at Mettler Toledo Thornton, about the role of advanced water analytics in semiconductor manufacturing. The discussion covers how ultra-pure water (UPW) systems are managed, monitored, and reclaimed using cutting-edge analytical tools to meet the industry's stringent quality and environmental standards.
Can you please introduce yourself and your role at your company?
Certainly. My name is Joel Kenyon, and I’m the Head of Product Management at Mettler Toledo Thornton. I’ve been with the company for six years, and I am a biologist by training. Over the past 15 years, I’ve developed and supported analytical instrumentation across academic and industrial sectors. At Mettler Toledo Thornton, I focus on advancing solutions for UPW analytics in the semiconductor industry.
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Why is water such a critical resource in semiconductor manufacturing?
Water is SEMI’s most precious commodity. Semiconductor fabs are the largest industrial users of ultra-pure water. A single fab producing 40,000 wafers per month can consume up to 18.2 million liters of water per day. The push for water reuse and the expansion of fabs in water-stressed areas underscore the need for efficient water management and analytics.
What are the most important parameters monitored in UPW systems?
Traditional parameters such as resistivity, TOC, pH, dissolved oxygen, and silica are primary control inputs in UPW systems. While resistivity and TOC are widely used, there's growing recognition that silica measurement technologies must advance to meet future needs. Each of these metrics plays a crucial role in ensuring water quality and yield.
Can you explain how reverse osmosis, deionization, and electrodeionization systems are monitored and optimized?
Monitoring strategies differ across systems. RO systems are tracked through pH, ORP, conductivity, TOC, and flow to calculate rejection and recovery. DI systems depend on resistivity and silica levels to identify resin exhaustion. EDI units similarly rely on conductivity and flow, with silica and sodium leakage indicating when intervention is required.
How does advanced water analytics improve operational control in fabs?
Advanced analytics reduce guesswork. Real-time data helps operators differentiate between true contamination and environmental or electrical noise. Systems like the UPW Unicond™ resistivity sensor provide high-accuracy readings, allowing fabs to confidently control processes and avoid both false alarms and undetected yield risks.
Why is real-time microbial monitoring gaining traction over traditional lab testing?
As traditional testing methods take anywhere from 5 to 21 days, they’re too slow for real-time control. In contrast, real-time microbial analyzers give fabs the ability to respond immediately - minimizing yield risks and improving process reliability. This faster feedback loop supports better, more timely decision-making across operations.
What are functional waters, and how are they used in semiconductor processes?
Functional waters, such as ozonated and hydrogenated ultrapure water (UPW), are engineered for targeted cleaning steps in semiconductor manufacturing. Ozonated water is used to oxidize and break down organic contaminants, while hydrogenated water plays a key role in removing metals and particles. Both types require tight control and precise analytics to ensure they’re properly formulated and performing as intended.
How is reclaimed water integrated back into the UPW system or other plant utilities?
Once water has been used, it’s evaluated for potential reuse - either within the UPW loop or redirected to other systems like cooling towers. Key parameters such as Total Organic Carbon (TOC), silica levels, and pH determine its suitability for reintegration. Robust analytics are essential for making these calls, supporting more sustainable reuse practices that align with zero-discharge goals.
What technologies enable these precise and low-level measurements?
Mettler Toledo’s UPW Unicond™ resistivity sensor is a leading tool for ultrapure water monitoring. Known for its long-term stability and better-than-0.5 % accuracy, it resists interference from environmental factors and reliably distinguishes between background noise and real contamination. With built-in temperature compensation and a durable design, it gives fabs the confidence to make informed decisions in real time.
What is the outlook for water analytics in the semiconductor industry?
As device geometries shrink and fabs expand into water-stressed regions, the demand for reliable, high-resolution analytics continues to grow. Tools like the UPW Unicond™ are built to meet these challenges, offering the precision needed to reduce unplanned downtime, protect yield, and support smarter, more resilient water management strategies.
About Joel Kenyon
Joel Kenyon is the Head of Product Management at Mettler Toledo Thornton, where he leads the development of high-performance analytical tools for ultra-pure water systems in semiconductor manufacturing.
He has a background in biology, with over 15 years of experience developing instrumentation for academic and industrial applications. At Mettler Toledo, Kenyon has played a key role in introducing next-generation sensors like the UPW
Unicond™, aimed at enhancing water quality monitoring in advanced semiconductor fabs. His work supports the industry’s move toward tighter process control, increased sustainability, and minimized risk through innovative water analytics solutions.
This information has been sourced, reviewed and adapted from materials provided by METTLER TOLEDO - Process Analytics.
For more information on this source, please visit METTLER TOLEDO - Process Analytics.
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