ZEISS MultiSEM 505/506 Scanning Electron Microscope

Users can currently release the acquisition speed of up to 91 parallel electron beams with ZEISS MultiSEM. This can image samples on the centimeter-scale at nanometer resolution. The scanning electron microscope (SEM) system has been specifically developed for trustworthy and continuous 24/7 operation.

It is possible for users to automatically obtain high-contrast images via MultiSEM just by setting up a high-throughput data acquisition workflow.

MultiSEM has been regulated with the proven ZEN imaging software and all of its options are arranged in an intuitive yet flexible method.

The ZEISS MultiSEM 505 scanning electron microscope was awarded the Microscopy Today Innovation Award in 2015.


Acquire Images at Highest Speed and Nanometer Resolution

  • Up to 91 electron beams can function at the same time with matchless imaging speed
  • Improved SE detection allows high contrast images to be obtained at low noise levels
  • MultiSEM takes around less than three hours to image an area of 1 cm² at a 4 nm pixel size

Acquire and Image Huge Samples

  • Users can image the complete sample and find everything they require to resolve their scientific questions
  • MultiSEM is available with a sample holder, spanning a total area of 10 cm × 10 cm
  • Automatic acquisition protocols allow huge area imaging and users will be able to get the elaborate nanoscale image without losing the macroscopic structure

ZEN Imaging Software

  • Users can regulate MultiSEM in an easy and intuitive method with the ZEN software, this has been proven for all ZEISS imaging systems
  • Smart auto-tuning routines aid users while capturing images with high-resolution and high contrast
  • Users can easily and quickly set up complicated automatic acquisition procedures that are suited and tuned to their samples with the ZEN imaging software.


MultiSEM applies both multiple electron beams (green: illumination path) and detectors in parallel, and a finely tuned detection path (red) gathers a huge yield of secondary electrons (SE) for imaging.

Every beam executes a synchronized scanning routine at one sample position, thereby generating a single sub-image. These beams are fixed in a hexagonal pattern. By combining all image tiles jointly, the full image has been developed.

For quick data recording, a parallel computer setup has been utilized for quick data recording that enhances the complete imaging speed. In the MultiSEM system, both image acquisition and workflow control processes are separated.

Integrated Workflow

Serial Array Tomography for Acquisition of Large Volumes

  • It is possible for users to automatically section the resin-embedded biological tissue with the ATUMtome, which can collect up to 1000 serial sections in one day.
  • The section tape could be mounted on a silicon wafer and then the sample can be imaged with a ZEISS light microscope. Shuttle and Find and the ZEN imaging software can be utilized to make an overview image. Then, the wafer can be transferred to MultiSEM and the overview image can be utilized to navigate the sample with the help of the same ZEN user interface.
  • The full acquisition workflow experiment has been set up with a single graphical control center. The effective automated section detection allows users to determine and aim at their regions of interest in a brief period of time.

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