Everything in One Microsystem

Blurred photos and shaky films will soon be a thing of the past thanks to rotation sensors. They precisely measure the rate of rotation around all spatial axis. Combined with evaluation electronics, they can also be used in navigation and stabilization systems.

Neither cars nor cameras can get by without electronic components today. And the requirements are growing more and more sophisticated: Components have to be robust and reliable, combine multiple functions in a tiny space and be cheap to manufacture. The Fraunhofer Institute for Silicon Technology ISIT and the Austrian company SensorDynamics AG are developing complete customer-specific microsystems in cooperation with a major automotive supplier.

Angular rate sensor precisely measure the rate of rotation around a spatial axis. Combined with evaluation electronics, they are currently used mainly in navigation and stabilization systems. Installed in automobiles, they facilitate active control of the vehicle dynamics, can trigger air-bags if the automobile overturns, or improve the accuracy of GPS coordinates.

Such sensors can be used in other sectors too. They make the work of photographers and cameramen easier by preventing photos and films from blurring. Even spontaneous photos taken on a mobile phone look better if they are automatically steadied. The sensors measure the trembling movements and the camera electronic compensates them.

The measurement principle is that of a capacitor: Angular rates causes the distance of the tiny comb-like structures to vary in time. This changes their elecrical capacity correspondingly. The signals are processed by highly intelligent integrated system electronics. The whole micro-system is housed in an extremely small package. Although tiny it is packed with a lot of functions: It can test itself, recognize faults and compensate for early signs of wear. It also integrates components for registering measurements, processing signals, controlling interfaces and transmitting data. Scientists are currently preparing the modules for series production. “The example of the rotation sensor shows the importance of interdisciplinary cooperation for a speedy time to market. This is especially important in microsystems technology,” summarizes ISIT director Professor Anton Heuberger. “At our institute we already produce the components on an industrial scale.”

http://www.fraunhofer.de

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