RPMBlue-FS PL Mapping System from Nanometrics for Compound Semiconductor Users
This video shows the functioning of Nanometrics’ RPMBlue-FS, photoluminescence (PL) mapping tool that can be fixed with a robotic wafer handler when required. This PL mapping system has a research-grade 300mm focal length monochromator that can cover wavelengths ranging from 200nm to 2.6μ. It can even handle wafer sizes spanning from 2 to 6".
The high-speed room temperature PL mapper can meet the requirements of compound semiconductor users. It has the ability to control up to 8 MOCVD reactors with a throughput of nearly 35 wafers per hour on foreign samples and 80 wafers per hour on 2” LED wafers.
Run Time – 2:25min
The RPMBlue-FS photoluminescence mapping tool from Nanometrics