Process of Carbon MEMS Technology (C-MEMS)

Carbon-MEMS (C-MEMS) refers to a microfabrication technique in which photopatterned resists, heat treated (pyrolyzed) at different temperatures in different ambient gases, are used as a carbonaceous structural and functional material for micro electromechanical systems (MEMS). This new material permits an entire new variety of novel MEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. Moreover, carbon surfaces form better electrochemical electrodes and are easier to derivatize with organic molecules than more traditional MEMS materials such as silicon.


Carbon MEMS Technology (C-MEMS)

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