To better understand electronic and electric materials, cryogenic or temperature-dependent studies are monitored using helium and liquid nitrogen stages.
Features:
	- Stabilization of beam-sensitive materials under high beam currents
- Low-temperature phases can be analyzed
- Improved spectroscopy and imaging, mainly for cathodoluminescence (CL)
Table No.1: Liquid Helium Cooling Stage
	
		
			| Model # | Base temp.
 | Cool down time | Max. operating temp. | Tilt | Rotate | Additional electrical feedthrough option | 
	
	
		
			| C1001 | -185 °C | 10 min | 50 °C | 45° | ±5° | √ | 
		
			| C1002 | -185 °C | 10 min | 200 °C | 45° | ±5° | √ | 
		
			| C1003 | -185 °C | 10 min | 400 °C | 45° | ±5° | √ | 
		
			| CF302 | 6 K | 45 min | 140 K |  |  | √ | 
		
			| CF302M | 8 K | 55 min | 140 K |  | ±5° | √ | 
	
Table 1. Source: Gatan Inc.
Liquid Nitrogen Cooling Stages C1001, C1002, C1003
	- Nitrogen gas cools stages to less than −185 °C
- Straightforward installation/removal permits the utilization of standard SEM stage
- Quick cool down and stable temperatures are ensured by efficient thermal design
- Higher upper-temperature options allow more flexibility in experiments
- Vibration due to boiling of LN2 is removed by the external liquid nitrogen heat exchanger
- High-precision control through temperature sensor and integral heater 
Liquid Helium Cooling Stages CF302, CF302M
	- CF302M — a helium-cooled stage module — attaches to the SEM goniometer and requires more care than the CF302
- Complete replacement SEM stage and door assembly with X, Y, and Z axis manual micrometers
- Exclusively engineered vibration and low drift, while reducing the consumption of liquid helium
- Depending on the configuration and intended use, an optional radiation shield can be included
- Complete system includes top fitting with bladder and valve, flexible transfer tube storage vessel, gas flow pump, gas flow controller, and digital temperature controller 
 
Dual Fuel Option
	- Works by forcing cold nitrogen gas through the circuit that is similar to the successful C1002 product
- Allows operation of liquid helium cold stages with both helium and nitrogen
Accessories — Anti-Contaminators
	- Anti-contaminators C1005, C1006, or C1007 are included as accessories
Table No.2: Liquid Nitrogen Cooling Stage
	
		
			| Model # | Base temp.
 | Cool down time max
 | Max. operating temp.
 | Heater control individual individual
 | Individual cooling circuit
 | 
	
	
		
			| C1005 | Less than -185 °C | 10 min | 50 °C |  |  | 
		
			| C1005B | Less than -185 °C | 10 min | 50 °C |  | √ | 
		
			| C1006 | Less than -185 °C | 10 min | 50 °C |  | √ | 
		
			| C1007 | Less than -185 °C | 10 min | 50 °C | √ |  | 
	
Table 2. Source: Gatan Inc.