Parallel Metrology from PI
This video shows the working principle of the parallel-kinematic nanopositioning system from Physik Instrumente (PI). The nanopositioning system comes with capacitive sensors, reduced inertia, and parallel-metrology arrangement. The arrows in the video indicate the signal flow from the sensor to the closed-loop control. Red: X axis, blue: Y axis.
Run Time - 0:34min
Nanopositioning: Why Parallel-Metrology is Better, by www.nanopositioning.net