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More https://www.pi-usa.us/en/apps-tech/motion-control-solutions-for-the-semiconductor-industry/ and https://www.pi-usa.us/en/oem-systems/engineered-systems/. A high accuracy, multi-axis wafer inspection stage, based on linear motors, air bearings, and piezo nanopositioning combining stages and motors providing high-speed motion and dynamic leveling and angular corrections. More on precision automation systems https://www.pi-usa.us/en/tech-blog/search-blog-posts-by-category/automation-nano-automation/
Run Time - 0:55mins
Video Credit: PI (Physik Instrumente) LP
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