PI’s Hybrid Stage with Parent Position Measurement and Closed-Loop Control
This video shows the working mechanism of Physik Instrumente (PI)’s Hybrid Stage. PI offers a unique hybrid concept with parent position measurement and closed-loop control. Some of the key features include simultaneous control of piezo flexure drives and DC-servo/ball screw drives, repeatability in the nanometer range, millisecond settling time to nanometer precision, high consistent velocity, and high drive and holding forces at minimum energy requirements/thermal dissipation.
Hybrid stages are mainly suited for applications that require high accuracy for measuring and returning to a position, or for surface inspection and metrology for attaining a target position accurately to the nanometer.
Run Time - 0:48min