EVG®7200: Automated SmartNIL® UV Nanoimprint Lithography System

The EVG7200 automated UV nanoimprint lithography system utilizes EVG’s novel SmartNIL technology and EVG’s materials expertise to allow mass manufacturing of micro- and nanoscale structures.

The system helps apply the latest soft stamp and imprint capability of SmartNIL to bigger substrates and smaller geometries, with resolution measuring down to 40 nm* in volume production. This allows higher cost-of-ownership (CoO) benefits and helps achieve the complete manufacturing ability of nanoimprint lithography.

*Resolution is based on process and template


  • Proprietary SmartNIL® technology available with multiple-use polymer stamp technology
  • Optional top-side alignment
  • Volume-proven imprinting technology with excellent replication fidelity
  • Optional mini-environment
  • Comes with automated cassette-to-cassette handling along with semi-automated R&D mode
  • Scalability ensured from R&D to production
  • Availability of demolding, combined imprinting, UV curing and working stamp fabrication
  • System housing for ideal process stability and reliability
  • Open platform offered for all commercially available imprint materials

Technical Data


. .
Wafer diameter (substrate size) 75 up to 200 mm
Resolution ≤40 nm (resolution dependent upon template and process)
Supported Process SmartNIL®
Exposure source High-power LED (i-line) > 400 mW/cm²
Alignment Optional top side alignment
Automated separation Supported
Mini environment and climate control Optional

Working stamp fabrication


Source: EV Group

Other Equipment by this Supplier

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.