Since its introduction, the JEOL ARM (Atomic Resolution Microscope) TEM/STEM series has become a preferred platform for atomic-resolution imaging and analytical research. Positioned at the forefront of spherical aberration–corrected instruments, the ARM product line continues to support cutting-edge advancements in the field.
To meet the growing demand for high-resolution imaging of materials containing light elements and those sensitive to electron-beam damage, JEOL developed the 200 kV NEOARM Atomic Resolution Imaging & Analytical Electron Microscope.
The NEOARM delivers atomic-resolution imaging across a broad range of accelerating voltages—from 30 kV to 200 kV. It is equipped with a high-brightness cold field emission gun (Cold-FEG) and JEOL’s next-generation ASCOR spherical aberration corrector, which compensates for higher-order aberrations.
A fully automated aberration correction module, powered by JEOL’s rapid correction algorithm, allows for fast and accurate tuning of aberrations using the user's own sample. This enables efficient, high-throughput atomic-resolution imaging and analysis, even at low voltages.
The system also includes a new standard STEM detector designed to enhance contrast for light elements. This is achieved through JEOL’s advanced e-ABF (enhanced Annular Brightfield) imaging technique, optimized for the observation of low-Z and light-element materials.
Key Features
Cs Corrector "ASCOR" (Advanced STEM Corrector)
The ASCOR Cs corrector, optimized specifically for the NEOARM, effectively suppresses six-fold astigmatism—a key limitation in resolution even after standard Cs correction. When paired with the Cold-FEG, ASCOR enables the NEOARM to achieve exceptional resolution, reaching 0.071 nm in HAADF-STEM, and delivers unmatched performance even at lower accelerating voltages.
Automated Aberration Correction Software JEOL COSMO™ (Corrector System Module)
JEOL’s COSMO™ features a newly developed aberration correction algorithm, SRAM (Segmented Ronchigram Auto-correlation function Matrix), tailored for the NEOARM.
By analyzing a clean amorphous area on the user’s own sample, COSMO™ performs rapid and precise correction of higher-order aberrations—up to 5th order. This ensures that the electron probe remains optimized for both imaging and analysis, simplifying setup while maximizing performance.
New ABF (Annular Bright Field) Detector System
The ABF detector is widely recognized for its effectiveness in high-resolution imaging of light elements with strong contrast.
The NEOARM enhances this capability with a newly developed imaging technique called e-ABF (enhanced Annular Bright Field), which significantly improves contrast for light-element materials. This advancement enables clear, atomic-level structural observation of low-Z materials with exceptional detail.
Perfect Sight Detector
The perfect sight detector built into NEOARM employs hybrid scintillators. This detector allows for the capture of high-contrast and quantitative STEM images across the whole range of accelerating voltage.
Viewing Camera System
The Viewing Camera system, designed for remote operation/alignment, is an image observation system that employs two cameras. This technology allows for remote operation of the NEOARM by having one person look at the viewing screen while the other obtains images from a focusing screen.