The JEOL Smart Coater (DII-29010SCTR / DII-29030SCTR) is a fully automated sputter coater that applies a fine-grained gold or optional platinum coating to samples for scanning electron microscope (SEM) imaging.
Designed for ease of use, this sputter coater automates the entire process, from vacuum generation to sputtering. Simply place your samples inside, power on the unit, and select the desired sputtering time. The chamber evacuates and begins sputtering automatically. When the unit is turned off, it safely vents to atmosphere.
Key Features
- Deposits a thin, conductive coating that reduces charging on non-conductive materials and enhances secondary electron emission.
- Utilizes a low-voltage discharge method with a magnetron electrode for efficient cold sputtering.
- Minimizes sample damage by isolating the sample from the electrode and operating at low voltages.
- Coating thickness depends on the distance from the target, the position on the stage, and sputtering duration.
Basic coating conditions and resulting film thicknesses:
- Gold (Au) Target – Sample at 20 mm Working Distance (WD):
- 5 nm thickness at 1 minute
- 10 nm thickness at 2 minutes
- Platinum (Pt) Target – Sample at 20 mm WD:
- 4 nm thickness at 1 minute
- 8 nm thickness at 2 minutes