The JEM-ACE200F is a fully automated, high-performance, high-throughput S/TEM system designed to meet the demanding needs of semiconductor device development, yield enhancement, and FAB manufacturing support.
It delivers fast, stable, and high-resolution data acquisition for device characterization, offering precise critical dimension measurements, along with atomic-resolution imaging and sub-nanometer elemental analysis for defect detection.
Capable of fully unattended operation using pre-programmed recipes, the JEM-ACE200F is built on the proven platforms of JEOL’s Cs-corrected JEM-ARM200F and JEM-F200 instruments. It maintains excellent stability and resolution, even during rapid switching between TEM and STEM modes.
Key Features
- AutomationCenter for automated recipe data acquisition system
- CFEG or Schottky source-second-generation Cs Corrector (ASCOR) optional
- Dual, large-area EDS detectors for high speed chemical analysis
- HAADF/BF STEM and Secondary Electron detectors standard