The TurboDisc® K465i™ GaN MOCVD System is the newest entry into Veeco's K-Series platform, which is production-proven and provides high productivity and for HB LED high-volume production fabs around the globe. The K465i achieves up to 90% yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability. K465i also offers the industry's highest productivity due to its full automation and shortened recovery period after maintenance.
Key Features
- Combines the industry's highest capital efficiency with the highest productivity and best-in-class yields.
- Based on production-proven, high throughput K465 platform
- Incorporates new Uniform FlowFlange® technology for highest within wafer uniformity and ultimate process repeatability
- The simplified design provides ease of tuning for fast production qualification and fast recovery after maintenance
- Low maintenance TurboDisc® technology enables the highest system availability
- Lowest cost of ownership for maximum profitability