Quantum Microscope System Developed on HORIBA AFM Technology: ProteusQ

Based on HORIBA AFM technology, the Qnami ProteusQ is a comprehensive quantum microscope system and is the first scanning NV (nitrogen-vacancy) microscope developed for the atomic-scale analysis of magnetic materials.

The Qnami ProteusQ system features advanced software, electronics, and AFM optical platform. Its versatile design enables future modifications and scaling, expansion, and capability improvements.

The Qnami ProteusQ is a proprietary quantum technology that delivers high-precision images for users to directly see the most elusive properties of their samples as well as the effect of microscopic variations in their fabrication or design process.

The Qnami ProteusQ paves the way for novel research works and offers users a new level of control to stimulate innovation in the design, development, and delivery of intuitive and energy-efficient electronics.

Key Features

  • Strong, stable—proven SPM platform; tips come with an unparalleled lifetime
  • Quantum performance—a new level of mapping a broad range of magnetic signals for materials science domain and more
  • Atomic precision—sensitivity down to the single atomic layer along with nanoscale resolution
  • Easy usage—automated operations; sample and tip exchange can be made within a few minutes
  • Intuitive—no quantum expertise is needed
  • Limitless potential—can be extended to basic SPM modules (AFM, PFM, EFM, MFM, LFM, KPFM, Force curves, etc.) and additional quantum imaging modes
  • Customizable—measurements can be synchronized and user’s protocols can be run like Jupyter Notebook (Python)
  • Driven by HORIBA, a leading specialist in AFM and optics



  • 100 x 100 x 15 (+/−10%) µm3 XYZ piezo closed-loop sample scanner has XY non-linearity of 0.05% and Z non-linearity of 0.05%
  • A 5 x 5 x 15 mm3 motorized approach system helps position the XYZ sample to a positioning resolution of less than 1 µm
  • Maximum sample size—40 x 50 mm2, 15 mm thickness.
  • Noise level:
    • 0.1 nm RMS in XY dimension in 200 Hz bandwidth with capacitance sensors “on”
    • 0.02 nm RMS in XY dimension at 100 Hz bandwidth with capacitance sensors “off”
    • 0.04 nm RMS Z capacitance sensor at a bandwidth of 1000 Hz bandwidth
  • In-built miniaturized microwave near-field antenna; 4 x 4 x 4 mm3 XYZ manual stage for near-field antenna positioning with a resolution of less than 1 µm
  • Quantilever tuning-fork probe holder


  • XYZ closed-loop piezo objective scanner
  • Confocal optical unit with up-straight photon collection and 50-µm multimode fiber output coupler
  • 100x Plan Apo infinity-corrected objective, NA = 0.7, working distance—6 mm (30 x 30 x 15 μm3)
  • Optical diode laser (λ = 515 ± 5 nm), tunable output power 0.01–20.0 mW at focal point
  • Video microscope top channel, including LED illuminator and CMOS camera
  • NV bias magnet is placed on objective (vertical direction: –2.5 to +2.5 mT, manually adaptable)
  • Single-photon counting module

Microwave Generator

  • Gain compensated for flat power distribution across the entire frequency bandwidth
  • Operating frequency bandwidth is 2.5–3.5 GHz with a resolution of 10 Hz
  • Maximum power is more than 30 dBm, with a power resolution of 0.1 dB
  • 1 Gb Ethernet connection port available for data transmission
  • Four general-purpose Input-Output (GPIO) channels with TTL level specification


  • LabQ software for SNVM (NV fluorescence mode, optically detected magnetic resonance spectroscopy)
  • Windows software for control of Smartscan SPM modes
  • Measurement scripting abilities through Jupyter Notebook
  • Fluorescence auto-track routine

Other Equipment