Electron Backscatter Diffraction (EBSD): Precision in Microstructural Analysis

Electron Backscatter Diffraction (EBSD): Precision in Microstructural Analysis

EBSD is a powerful microanalysis technique that delivers detailed insights into the microstructural characteristics of crystalline materials. The performance of the EBSD detector is critical - impacting both acquisition speed and data quality.

Symmetry, from Oxford Instruments, is a next-generation EBSD detector built on advanced CMOS technology combined with fibre optics which has established a new benchmark for performance, sensitivity, and usability:

  • Indexing speeds exceeding 5,700 pps at 156 × 128 pixel EBSD pattern resolution
  • Exceptional sensitivity, enhancing all types of analysis
  • High-resolution patterns (1244 × 1024 pixels) for HR-EBSD applications
  • Unique fibre-optic coupling with sub-pixel distortion
  • Intuitive design for effortless operation
  • Consistent high-quality patterns at all speeds

Symmetry: One detector for every application - no compromises.


CMOS Speed, Sensitivity, and Versatility

Operating at over 5,700 patterns per second, the combination of Symmetry and AZtec offers the fastest EBSD solution available. This significant enhancement in performance benefits not only standard EBSD workflows but also advanced techniques such as 3D EBSD, large-area mapping, and in situ experiments.

With unmatched sensitivity and dynamic range, Symmetry excels in challenging conditions - where low beam currents and rapid, high-resolution patterns are essential. Speed and sensitivity are no longer trade-offs.

Designed for universal compatibility, Symmetry in combination with AZtec offers dynamic calibration, variable tilt, automated setup, and seamless EDS integration - ensuring accurate results every time.

Symmetry is more than an upgrade; it’s a revolution in EBSD technology, enabling breakthroughs in even the most demanding applications.


Breakthrough CMOS Technology

CMOS sensors have transformed imaging across multiple industries, combining speed and sensitivity. Symmetry leverages a custom CMOS sensor optimized for EBSD, delivering performance levels never before achieved. Whether prioritizing speed or sensitivity, Symmetry eliminates compromise.


One Detector. No Compromise.

Symmetry’s unique combination of speed and sensitivity ensures superior performance across diverse sample types. High acquisition rates are achieved without sacrificing data quality. Even for complex materials, like thin films and oxides, Symmetry delivers an order-of-magnitude improvement in speed while maintaining data quality.


Key Features

  • Indexing speeds > 5,700 pps
  • 156 × 128 pixel patterns at maximum speed - 16× more pixels than fast CCD detectors
  • Full-resolution patterns (1244 × 1024) for HR-EBSD strain analysis
  • Low-distortion optics enabling angular precision below 0.05°
  • High sensitivity ensuring high-quality patterns at low doses and beam energies – providing uncompromised spatial resolution
  • Seamless EDS integration at all speeds
  • Software-controlled tilt and auto-calibration for optimising data acquisition geometry while maintaining calibrations
  • Bellows SEM interface to maintain vacuum integrity
  • Proximity sensor for collision prevention and automatic retraction
  • Intuitive settings for optimal results every time
  • Five integrated forescatter detectors for full-colour channelling and atomic number contrast imaging

 

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