The recently introduced TOC-1000e S is the latest addition to Shimadzu’s eTOC Series lineup. This instrument has been specifically developed for the semiconductor manufacturing industry and is intended for continuous, high-sensitivity TOC monitoring of ultrapure water.
Its purpose is to facilitate the early detection of trace contamination, safeguard yield, minimize downtime, and enhance process reliability in essential manufacturing environments.
Discover the New TOC-1000e S
- High-sensitivity identification of hard-to-oxidize organic pollutants
- Prompt reaction to contamination occurrences
- High-visibility touch screen featuring intuitive, color-coded status indicators
- Requires just one maintenance visit per year for maximum uptime
- Accommodates multiple data output formats along with web browser features

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Features
Superior Detection Sensitivity for Hard-to-Oxidize Compounds
High Oxidation Capacity with Accurate Detection of Urea and Other Hard-to-Oxidize Compounds

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In semiconductor production, ultrapure water is generated from various water sources, and it is essential to eliminate impurities as effectively as possible throughout the purification process.
Urea poses a significant challenge due to its resistance to oxidation, and even small quantities can produce ammonia gas, leading to complications in the processing of semiconductor materials. Traditional online TOC analyzers, which operate on similar principles, frequently encounter difficulties in identifying these substances with adequate sensitivity.
The TOC-1000e S confronts this issue by utilizing an excimer lamp along with Shimadzu’s Active-Path design, which illuminates the sample with intense shortwave light, allowing for very sensitive identification of urea and other challenging-to-oxidize organic substances.
The mercury-free technology of its excimer lamp allows for a maintenance period of 12 months, and maintenance as well as recalibration can be carried out on site, thus minimizing service requirements and ensuring seamless operations.
Fast Response to Contamination Events
Ensures Rapid Detection of Impurities

Internal structure and measurement principle. Image Credit: Shimadzu Europa GmbH
Identifying contaminants in ultrapure water promptly assists in avoiding flaws in semiconductor substances and promotes consistent production standards. The TOC-1000e S features an uncomplicated measurement flow line and optimized internal flow speeds to reduce the time samples remain in the device.
This design enables new water samples to reach the detector swiftly, facilitating the rapid detection of contamination. In contrast to systems that focus solely on brief measurement times, the TOC-1000e S is built to ensure that the sample being analyzed is as up-to-date as possible, allowing users to swiftly respond to fluctuations in water quality.
Compact and Mobile for Key Control Point Monitoring

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The TOC-1000e S features a compact footprint and weighs only three kilograms, providing optimal versatility for continuous online water quality assessment. In the event of contamination, its lightweight nature facilitates movement between critical monitoring locations within the plant, allowing users to swiftly identify the origin of the problem.
With the ability to be mounted on a desk or wall and pipe using an available bracket kit, combined with straightforward on-site calibration through an optional vial sampler, the TOC-1000e S offers both ease of use and practicality without sacrificing effectiveness.
More Solutions for the Analysis
Shimadzu offers a wide selection of top-tier products for comprehensive water analysis. The cutting-edge solutions are crafted to guarantee accurate and dependable outcomes in various applications.
TOC-L Series

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The market-leading total organic carbon analyzer.
TOC-1000e

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With advanced technology housed in the most compact design, this online TOC analyzer is designed for applications involving pure water.
AIMsight

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AIMsight is a reliable automated defect analysis system that can be used with confidence from the initial analysis onward. It comes with advanced features as standard to assist with analysis.