The ONYX is a tabletop scanning electron microscope (SEM) that boasts the largest sample stage in its category: a motorized XY stage measuring 110 × 110 mm within a 220 × 220 mm chamber, designed to accommodate large components or multiple samples simultaneously.
It features high-performance secondary electron (SE) and backscattered electron (BSE) detectors, along with integrated energy dispersive spectroscopy (EDS) for rapid and precise elemental analysis.
Its modular, user-replaceable electron source minimizes maintenance requirements. Its compact design and user-friendly Discover software make it ideal for research and development, industrial applications, and educational purposes that do not necessitate specialized infrastructure.
Key Features
- Largest Stage in its Class: Its motorized XY stage measures 110 × 110 mm and is capable of accommodating up to 64 half-inch or 16 one-inch SEM sample stubs.
- Large Sample and Chamber Capacity: A chamber size of 220 × 220 mm, with a maximum sample height of 50 mm
- High-Performance SE and BSE Detectors: Offers mixed-mode SE/BSE image viewing utilizing a four-quadrant BSD for detailed topographical imaging
- Embedded EDS: Point Analysis, Line Scan, and Element Mapping
- Low Vacuum and Low Beam Imaging: Minimizes charging effects on non-conductive samples, providing high-quality imaging at voltages as low as 1 kV
- User-Replaceable Electron Source: Reduces downtime and eliminates the need for expensive source replacements
- <8 nm Resolution
- Automated workflow prepared
- 1 to 20 kV acceleration voltage
- 1000+ hour filament lifetime performance (ECO-mode)
Large Stage
Designed for Large Samples and High Throughput
The ONYX large stage facilitates the examination of larger components and several samples simultaneously within a single configuration.
Its motorized stage, measuring 110 × 110 mm, can accommodate up to 64 half-inch SEM sample stubs, offering the necessary flexibility for efficient and high-throughput workflows.
Semplor Discover Software Platform
Embedded EDS, from Acquisition to Reporting
- Live mapping for instant visual feedback
- All-in-one project structure
- Advanced map blending
- Instant element identification and quantification
- Line scan analysis
- One-click reporting
Energy resolution: < 29 eV @ Mn Kα · Detectable element range: B (5) to Am (95)
Semplor Explore Apps
Explore Particles
Identifies, quantifies, and categorizes elements, voids, or granules, even those in contact. Delivers data regarding dimension, form, and quantity with downloadable analytical reports.
Explore Fibers
Evaluates fiber diameter, orientation, and curvature, accounting for superimposed fibers. Provides orientation and pore statistics, suitable for report export.
Explore 3D
Creates three-dimensional models and elevation maps from SEM images using stereo-pair, four-quadrant BSE, or single-image approaches, providing both visual and numerical surface details.
Specifications
Source: Semplor
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| Imaging mode |
Optical |
0.7 and 2.5x with up to 12.5x digital zoom |
| SEM |
Magnification range: 100–200,000x |
| Resolution |
<8 nm |
| Capture resolution |
Up to 4096 x 4096 pixels (4K) |
| Illumination |
Light optical |
Bright field |
| Electron optical |
Optimized thermionic source (tungsten);
Lifetime: 1000+ operating hours in ECO-mode |
| Acceleration voltages |
Default: 1, 2, 5, 7, 10, 15, and 20 kV |
| Detectors |
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Secondary electron detector (SED);
Backscattered electron detector (BSD): four quadrant
Energy Dispersive Spectroscopy detector (EDS): embedded |
| Light optical navigation camera |
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Full color |
| Image formats |
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JPEG, TIFF, PNG, BMP |
| User interface |
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Communication, imaging, and analysis use a single monitor with control via a wireless mouse and keyboard; remote control and diagnostics enabled |
| Sample stage |
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Computer-controlled motorized X, Y travel: 110 x 110 mm; up to 50 mm height; up to 16x 1" stubs or 64x 1/2" stubs; electrical and fluid feedthrough |
| Vacuum chamber |
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220 x 220 mm |
| EDS specifications |
Detector type |
Silicon Drift Detector (SDD), thermo-electrically cooled |
| Detector active area |
30 mm2 |
| Energy resolution |
@ Mn Kα <129 eV |
| Max. input count rate |
300,000 cps |
| Take-off angle |
30° |
| Hardware integration |
Fully embedded SDD, pulse processor, and scan generator |
| Software |
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Installed on Windows PC and controlled via user interface; EDS point analysis, line analysis, and mapping; reporting and export functions |
| System specifications |
Footprint |
420 (w) x 605 (d) x 625 (h) mm |
| Weight |
95 kg |
| Pumps |
Pfeiffer turbo molecular pump and Pfeiffer oil-free membrane pre-vacuum pump; motor-controlled vacuum levels via the user interface |
| Vacuum modes |
High vacuum SEM mode (standard); low vacuum mode (standard); vacuum of 40 Pascal for reduced charging |
| Workstation |
Pre-configured PC with a 27" monitor; SEM imaging and EDS Analysis software installed |
Ambient
conditions |
Temperature |
15–25 °C (59–77 °F) |
| Humidity |
20 to 80% RH |
| Geological height |
Up to 2000 meters |
| Power |
System typically in imaging mode: 110 W (max. 140 W) |
Applications
- Used in R&D, industrial, and academic environments
- Shifting standard imaging and analysis from outside SEM providers or large instruments
- Rapid evaluation for large or many specimens within one unified configuration
- Element composition and distribution (EDS)
- Characterization of particles, fibers, and 3D surfaces (Explore Apps)