NANOS EBSD Tabletop SEM for Microstructural Analysis

The NANOS EBSD integrates high-resolution SEM imaging with electron backscatter diffraction (EBSD) analysis in a compact and user-friendly tabletop platform.

By examining diffraction patterns, it precisely captures microstructural details such as crystal orientation, phase, and grain structure. Additionally, the built-in energy-dispersive spectroscopy (EDS) allows for simultaneous elemental and crystallographic analysis within a single system.

A eucentric tilt stage, capable of tilting up to 70°, ensures that the area of interest remains centered and in focus during the transition between imaging and EBSD acquisition, a distinctive feature among tabletop SEMs.

Key Features

  • Eucentric Tilt of up to 70°: Maintains the region of interest in focus and centered while tilting
  • Crystallographic Analysis in a Tabletop SEM: Obtain information on crystal orientation and structure directly from the system
  • Fast and Reliable Orientation Mapping: Quickly map crystal orientations throughout the sample
  • Phase Identification: Recognize and differentiate various crystalline phases
  • Compact and Integrated Design: Fully integrated EBSD functionality within a compact configuration
  • Combined EDS and EBSD Platform: Seamlessly transition between EDS and EBSD analysis within the same system
  • Resolution of less than 8 nm
  • Acceleration Voltage ranging from 1–20 kV
  • Over 1000 hours of Filament Lifetime Performance (ECO-mode)

Eucentric Tilt: The Key to Seamless EBSD

The integration of eucentric tilt with EBSD facilitates a smooth transition between imaging and crystallographic analysis.

Samples can be captured at both the 0° and 70° EBSD positions by simply tilting the stage, eliminating the need to break vacuum or adjust the sample's position.

Since the field of view, working distance, and focus remain consistent during the tilting process, an area identified during imaging can be directly transferred to the EBSD position without losing sight of the region of interest. This makes the transition between imaging and EBSD rapid, intuitive, and highly reproducible.

Bruker e-Flash XS Detector

  • Connection: True plug-and-play (PnP) device; data and power transfer via USB 3.0 cable
  • Detector Technology: CMOS imaging chip technology
  • Phosphor Screen: User-replaceable
  • Native Image Resolution: 720 × 540 pixels
  • Scan Generator: QUANTAX Scan system (external scan generator)
  • Binning Modes: 2×2, 3×3, 4×4, 5×5, 6×6
  • Speed: Up to 520 frames/second (fps) in all binning modes
  • Optics: Custom-made optics system with field lens for maximizing light efficiency
  • Dimensions: Length ∼84 mm (3.31 in), diameter ∼48 mm (1.89 in)
  • Weight: 0.85 kg

Bruker ESPRIT Software

  • Interface: Acquisition and processing of EBSD data utilizing the ESPRIT software interface
  • Processing Speed: Employs multithreaded technology for rapid reindexing of EBSD data at rates of up to 60,000 points per second
  • Signal Optimization and Indexing: A variety of automated and semi-automated features available for signal enhancement and pattern indexing
  • Phase Editor: Simplified creation and/or modification of phase entries utilized in pattern indexing
  • Misorientation Analysis: Features for analyzing misorientation distribution
  • Grain Reconstruction: Automatic reconstruction of grains and calculation of statistics, including size, shape, and main-axis inclination
  • Grain Boundary Analysis: Incorporating CSL
  • Data Processing: Various options for creating and processing multiple subsets
  • Texture Analysis: Features for representing orientation distribution and crystallographic texture
  • Phase Databases: Inclusion of the Bruker Phase Database and the American Mineralogist Phase Database
  • Reporting: Capability to generate and export reports
  • Data Export: Ability to export maps and histograms in text and standard image formats such as JPEG, PNG, Bitmap, and TIFF

Specifications

Source: Semplor

     
Imaging mode Optical 2 and 12x optical with up to 60x digital zoom
SEM Magnification range: 100–200.000x
Resolution <8 nm
Capture resolution Up to 4096 x 4096 pixels (4K)
Illumination Light optical Bright field
Electron optical Optimized thermionic source (tungsten)
Lifetime: 1000+ operating hours in ECO-mode
Acceleration voltages Default: 1, 2, 5, 7, 10, 15 & 20 kV
Detector Secondary electron detector (SED)
Backscattered electron detector (BSD): four quadrant
Energy Dispersive Spectroscopic detector (EDS): embedded
Electron Backscatter Diffraction (EBSD): non-retractable
Light optical navigation camera Color
Image formats JPEG, TIFF, PNG, BMP
User interface Communication, imaging, and analysis use a single monitor with control via a wireless mouse and keyboard.
Remote control and diagnostics enabled.
Network, USB, workstation
Sample stage Eucentric tilt stage (0–70 °) manual
Computer-controlled motorized X, Y: 12.5 x 12.5 mm
Sample size Up to 12.5 mm diameter
Up to 17.5 mm height 
EDS specifications Detector type Silicon Drift Detector (SDD), thermo-electrically cooled
Detector active area 30 mm2
Energy resolution @ Mn Kα <132 eV
Max. input count rate 300,000 cps
Hardware integration Fully embedded SDD, pulse processor and scan generator.
Software Installed on Windows PC and controlled via user interface
EDS point analysis, line analysis and mapping
Export functions
EBSD EBSD analysis with Bruker ESPRIT software
Beam control with external scan generator capability
Systems
specifications
Footprint 280 (w) x 470 (d) x 550 (h) mm
Weight 62 kg
Pumps Pfeiffer Turbo molecular pump and an oil-free membrane pre-vacuum pump
High-vacuum SEM mode (standard)
Low-vacuum mode (standard): vacuum of 40 Pascal for reduced charging
Motor-controlled vacuum levels via the user interface
Workstation Pre-configured All-in-One PC with a 27” monitor
SEM imaging and EDS Analysis software installed
Ambient
conditions
Temperature 15–25 °C (59–77 °F)
Humidity 20–80% RH
Power System in typical power imaging mode: 110 W (max. 140 W)

Applications

Source: Semplor

Industries Materials Typical EBSD Measurements
Academia Metals Grain size
Materials Science Alloys Texture
Metals Processing and Production Intermetallics Phase identification
Aerospace Thin Films Phase distribution
Automotive Semiconductors Failure analysis
Government and Defense Superconductors Strain analysis
Petrochemical Ceramics Deformation and recrystallization
Nuclear Rocks & minerals Grain boundaries
Chemical Biomaterials CSL boundary distribution
Microelectronics Particles Phase transformation
Energy/Batteries Nanomaterials Parent grain analysis
Environment Elastic properties

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