The NANOS EBSD integrates high-resolution SEM imaging with electron backscatter diffraction (EBSD) analysis in a compact and user-friendly tabletop platform.
By examining diffraction patterns, it precisely captures microstructural details such as crystal orientation, phase, and grain structure. Additionally, the built-in energy-dispersive spectroscopy (EDS) allows for simultaneous elemental and crystallographic analysis within a single system.
A eucentric tilt stage, capable of tilting up to 70°, ensures that the area of interest remains centered and in focus during the transition between imaging and EBSD acquisition, a distinctive feature among tabletop SEMs.
Key Features
- Eucentric Tilt of up to 70°: Maintains the region of interest in focus and centered while tilting
- Crystallographic Analysis in a Tabletop SEM: Obtain information on crystal orientation and structure directly from the system
- Fast and Reliable Orientation Mapping: Quickly map crystal orientations throughout the sample
- Phase Identification: Recognize and differentiate various crystalline phases
- Compact and Integrated Design: Fully integrated EBSD functionality within a compact configuration
- Combined EDS and EBSD Platform: Seamlessly transition between EDS and EBSD analysis within the same system
- Resolution of less than 8 nm
- Acceleration Voltage ranging from 1–20 kV
- Over 1000 hours of Filament Lifetime Performance (ECO-mode)
Eucentric Tilt: The Key to Seamless EBSD
The integration of eucentric tilt with EBSD facilitates a smooth transition between imaging and crystallographic analysis.
Samples can be captured at both the 0° and 70° EBSD positions by simply tilting the stage, eliminating the need to break vacuum or adjust the sample's position.
Since the field of view, working distance, and focus remain consistent during the tilting process, an area identified during imaging can be directly transferred to the EBSD position without losing sight of the region of interest. This makes the transition between imaging and EBSD rapid, intuitive, and highly reproducible.
Bruker e-Flash XS Detector
- Connection: True plug-and-play (PnP) device; data and power transfer via USB 3.0 cable
- Detector Technology: CMOS imaging chip technology
- Phosphor Screen: User-replaceable
- Native Image Resolution: 720 × 540 pixels
- Scan Generator: QUANTAX Scan system (external scan generator)
- Binning Modes: 2×2, 3×3, 4×4, 5×5, 6×6
- Speed: Up to 520 frames/second (fps) in all binning modes
- Optics: Custom-made optics system with field lens for maximizing light efficiency
- Dimensions: Length ∼84 mm (3.31 in), diameter ∼48 mm (1.89 in)
- Weight: 0.85 kg
Bruker ESPRIT Software
- Interface: Acquisition and processing of EBSD data utilizing the ESPRIT software interface
- Processing Speed: Employs multithreaded technology for rapid reindexing of EBSD data at rates of up to 60,000 points per second
- Signal Optimization and Indexing: A variety of automated and semi-automated features available for signal enhancement and pattern indexing
- Phase Editor: Simplified creation and/or modification of phase entries utilized in pattern indexing
- Misorientation Analysis: Features for analyzing misorientation distribution
- Grain Reconstruction: Automatic reconstruction of grains and calculation of statistics, including size, shape, and main-axis inclination
- Grain Boundary Analysis: Incorporating CSL
- Data Processing: Various options for creating and processing multiple subsets
- Texture Analysis: Features for representing orientation distribution and crystallographic texture
- Phase Databases: Inclusion of the Bruker Phase Database and the American Mineralogist Phase Database
- Reporting: Capability to generate and export reports
- Data Export: Ability to export maps and histograms in text and standard image formats such as JPEG, PNG, Bitmap, and TIFF
Specifications
Source: Semplor
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| Imaging mode |
Optical |
2 and 12x optical with up to 60x digital zoom |
| SEM |
Magnification range: 100–200.000x |
| Resolution |
<8 nm |
| Capture resolution |
Up to 4096 x 4096 pixels (4K) |
| Illumination |
Light optical |
Bright field |
| Electron optical |
Optimized thermionic source (tungsten) Lifetime: 1000+ operating hours in ECO-mode |
| Acceleration voltages |
Default: 1, 2, 5, 7, 10, 15 & 20 kV |
| Detector |
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Secondary electron detector (SED) Backscattered electron detector (BSD): four quadrant Energy Dispersive Spectroscopic detector (EDS): embedded Electron Backscatter Diffraction (EBSD): non-retractable |
| Light optical navigation camera |
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Color |
| Image formats |
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JPEG, TIFF, PNG, BMP |
| User interface |
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Communication, imaging, and analysis use a single monitor with control via a wireless mouse and keyboard. Remote control and diagnostics enabled. Network, USB, workstation |
| Sample stage |
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Eucentric tilt stage (0–70 °) manual Computer-controlled motorized X, Y: 12.5 x 12.5 mm |
| Sample size |
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Up to 12.5 mm diameter Up to 17.5 mm height |
| EDS specifications |
Detector type |
Silicon Drift Detector (SDD), thermo-electrically cooled |
| Detector active area |
30 mm2 |
| Energy resolution |
@ Mn Kα <132 eV |
| Max. input count rate |
300,000 cps |
| Hardware integration |
Fully embedded SDD, pulse processor and scan generator. |
| Software |
|
Installed on Windows PC and controlled via user interface EDS point analysis, line analysis and mapping Export functions |
| EBSD |
EBSD analysis with Bruker ESPRIT software Beam control with external scan generator capability |
Systems specifications |
Footprint |
280 (w) x 470 (d) x 550 (h) mm |
| Weight |
62 kg |
| Pumps |
Pfeiffer Turbo molecular pump and an oil-free membrane pre-vacuum pump High-vacuum SEM mode (standard) Low-vacuum mode (standard): vacuum of 40 Pascal for reduced charging Motor-controlled vacuum levels via the user interface |
| Workstation |
Pre-configured All-in-One PC with a 27” monitor SEM imaging and EDS Analysis software installed |
Ambient conditions |
Temperature |
15–25 °C (59–77 °F) |
| Humidity |
20–80% RH |
| Power |
System in typical power imaging mode: 110 W (max. 140 W) |
Applications
Source: Semplor
| Industries |
Materials |
Typical EBSD Measurements |
| Academia |
Metals |
Grain size |
| Materials Science |
Alloys |
Texture |
| Metals Processing and Production |
Intermetallics |
Phase identification |
| Aerospace |
Thin Films |
Phase distribution |
| Automotive |
Semiconductors |
Failure analysis |
| Government and Defense |
Superconductors |
Strain analysis |
| Petrochemical |
Ceramics |
Deformation and recrystallization |
| Nuclear |
Rocks & minerals |
Grain boundaries |
| Chemical |
Biomaterials |
CSL boundary distribution |
| Microelectronics |
Particles |
Phase transformation |
| Energy/Batteries |
Nanomaterials |
Parent grain analysis |
| Environment |
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Elastic properties |