Compact Scanning Electron Microscope - CX-200Plus

The CX-200plus is a full-size floor model Scanning Electron Microscope (SEM) that offers high resolution imaging capabilities at a very attractive price.  The CX-200plus includes both SE and BSE imaging detectors as well as an internal chamber view camera for easy stage tilt and height adjustments.   

Numerous analytical optionse available for the CX-200plus, including EDS and WDS elemental micro-analysis; EBSD micro-structure crystalline analysis;  and CL (cathodoluminescence) internal structure analysis.  Automated analysis capabilities for features and particles are available through our EDS partners.

A unique feature of the CX-200plus is our “Panorama” mode that allows the SEM to collect high resolution images of large samples by controlling the motorized stage at higher magnification and automatically collect large images from several to thousands of tiled images.  This capability if very useful for applications such as detailed examination or metrology of semiconductors and electronic assemblies as well as producing images that can be printed in poster or wall sizes with high definition.

Key Specifications

  • Resolution up to 3 nm
  • Compact and robust performance
  • Panorama Mode standard
  • Standard BSE, SE detector
  • Mixing of signal
  • Standard chamber scope
  • 10 Ports for third party analytical tools
  • EDS fully compatible

Nano-Station 4.0 (COXEM SEM Dedicated Software)

The NS 4.0 software offers the most comfortable and intuitive user interface (UI) for the operations of COXEM SEM. The software has features that experienced SEM users require coupled with a simple interface allowing even novice users to quickly gain proficiency.

Furthermore, the panorama shot function avoids the inconvenience to users caused while directly controlling the camera, as well as moving and shooting for a long time, by enabling automatic capture of dozens or hundreds of shots of the preferred portion of the image. And by utilizing the dual display mode operators can look at either the SE or BSE detectors, or a composite image of both.

Compact Scanning Electron Microscope

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