Vacuum Chamber Cleaning System for TESCAN SEM/FIB: Evactron ES De-Contaminator

The ES De-Contaminator from Evactron is a high performance, compact, yet streamlined plasma cleaner designed for Tescan Ion and Electron Beam Instruments, like FIBs and SEMs.

The Evactron ES De-Contaminator can be cleaned easily, providing higher contrast imaging and resolution and also improving the sensitivity of probes and detectors that are otherwise affected by contamination.

The Evactron ES Plasma Radical Source has a compact design that makes it a multipurpose solution for load locks, FIB/SEM chambers, or sample preparation chambers. The Evactron ES Plasma Cleaner provides rapid, effective and mild cleaning across a broad range of pressures, allowing artifact-free, high quality images, as well as improved efficiency of sample analysis.

System Features

  • Energy efficient radiofrequency hollow cathode plasma
  • Dual action cleaning through plasma and UV afterglow
  • RF power—10 to 20 W at 13.56 MHz
  • A broad range pressure operation—1 Torr to 22 mTorr, or 133 Pa to 3 Pa
  • The Tescan GUI provides programmable power, cleaning time
  • High vacuum 'pop' ignition
  • Ensures rapid cleaning that is more than 60 times faster than the previous generation of Evactron versions
  • Compatible with TMP and does not require advance venting
  • Vacuum-safety interlock and external interlock connection (optional)
  • Push button cleaning operation
  • PRS can be set up on the load lock or the SEM chamber
  • Sensitive components are not damaged, as there is no sputter etch
  • Match or gas flow modifications are not required for plasma ignition
  • Complies to NRTL, TUV, CE, SEMI and RoHS standards

The Evactron ES Plasma De-Contaminator was specifically developed for OEM integration for high vacuum, FIB, SEM and other analytical systems. The streamlined Evactron Plasma Radical Source (PRS) has a small footprint and uses air plasma afterglow to decrease hydrocarbon contamination, providing fast and efficient results.

Specifications of Evactron ES System

  • Includes 2U rack-mount controller for system integration
  • FIB/SEM host-directed control
  • Compact Plasma Radical Source (PRS)
  • Hardware interlock (optional)
  • Offers 100 to 240 VAC and 50/60 Hz input
  • RF power—10 to 20 W at 13.56 MHz CCP
  • Complies to NRTL, TUV, CE, SEMI and RoHS standards

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