Plasma Cleaner: Evactron® Model 25 Zephyr

The Evactron® Model 25 Zephyr is a plasma cleaner designed for in-situ cleaning of chambers and samples in vacuum chambers and electron microscopes.

The Evactron® plasma cleaner includes a dual-vacuum mode that enables TMP or roughing pump operation for microscopes with either diffusion-pumped or turbo-pump vacuum systems.

For all cleaning requirements, the Evactron® Model 25 Zephyr features a solid-state Micropirani Gauge. A table-top controller/RF generator with automatic RF/pressure level control, an RF Plasma Hollow Cathode Radical Source (PRS), a manual, cables and a limited warranty of five years.

System Features

  • Completely adjustable ignition and operating pressures
  • Dual-action cleaning using UV afterglow and plasma
  • Pirani gauge for tracking chamber vacuum
  • Turns on during pump down, which is safe for diffusion and turbo-pump operations
  • Does not cause damage to sensitive components—no sputter etch
  • Small desktop controller with a simple onebutton operation
  • Complies to SEMI, NRTL, CE and TUV standards
  • Programmable power, number of cycles and cleaning time
  • Limited warranty of five years
  • Room air is used as a gas source for low operating cost and ease of use

Specifications of Evactron® Model 25 Zephyr System

  • RF generator is harmonically suppressed and stabilized
  • RF power ranges between 10 to 20 W at 13.56 MHz
  • Uses room air for the production of oxygen radicals
  • Includes a KF 40 vacuum mounting flange
  • Comes with a vacuum safety interlock
  • Fixed RF Match fitted on an RF feedthrough
  • MKS MicroPirani transducer enables vacuum measurement
  • Serial interface, fault display, readout and log
  • Servo-controlled air bleed valve for pressure and flow adjustments
  • LEDs: Power on, Plasma on, RF on, enable switch and Fault; LCD is available for line display
  • Electronic chassis—height × width× depth: 5.5″ × 9.5″ × 9.5″ (14 × 24.1 × 24.1 cm)
  • Includes 100 to 240 VAC, 50/60 Hz input and 150 W

Plasma Cleaner: Evactron® Model 25 Zephyr

Image Credit:  Evactron (XEI Scientific)

Plasma Cleaner: Evactron® Model 25 Zephyr

Image Credit:  Evactron (XEI Scientific)

Other Equipment by this Supplier