The AirSentry® II series of ion mobility spectrometers identify and alert operators to minute concentrations or variations in the levels of ammonia-containing species, acids, amines, and chlorides in the air. These point-of-use sensors have a sensitivity of parts per trillion (ppt), allowing for rapid reaction times, enhanced detection selectivity, and repeatable performance.
The combination of Air Sentry II sensors and a centralized software platform enables simple data collection and processing. The AirSentry II sensor series provides continuous actionable data, allowing for quick reaction to contamination sources and occurrences.
Benefits
- Constant AMC monitoring of critical locations
- Robust and reliable data collection, control, and evaluation
- Long-term data stability
- Lowest cost-per-test
Features
- High-sensitivity identification of bases and acids, including ammonia, chlorides, and amines
- Adaptable product set up for mobile, multi-point, and point-of-use monitoring uses
- Compact size allows placement in any location
- Ethernet, RS-232, 4-20 mA outputs
Applications
- Real-time monitoring of corrosion in etch process regions
- Monitoring of ammonia and amine in real-time within critical lithography systems
- Quantification of chemical filter efficiency
- Monitoring and troubleshooting contamination sources throughout in-process and cleanroom instruments
- Contamination analysis within FOUP wafer storage modules
Specifications
Source: Particle Measuring Systems
| . |
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| Contaminants detected |
Individual analyzers to detect Ammonia, Amines, or Acids |
| Range |
0 – 50 ppbv |
| Sample flow |
< 1000 cc/min |
| LDL (3σ)* |
70 pptv |
| Response time |
< 5 minutes to 95 % (Dry) |
| Cleardown time |
< 5 minutes to 5 % (Dry) |
| Temperature range |
Operating: 59 – 86 °F (15 – 30 °C)
Storage: - 40 – 122 °F (- 40 – 50 °C) |
| Humidity range |
Operating: 30 – 60 % RH
Storage: 0 – 90 % RH |
| Dimensions (H x W x L) |
4 x 9 x 12 in (10 x 23 x 31 cm) |
| Weight |
5 lb (2.3 kg) |
| |
* 5 minute sample averaging, 760 Torr |
| Utility Requirements |
|
| Power |
100 – 240 VAC (50/60 Hz), 60 W |
| Clean Dry Air (CDA) |
< 1000 cc/min, < - 60 °C dew point, 5 psig pressure regulated, no particles > 50 μm, hydrocarbon free |
| Vacuum |
< 33 kPa (absolute) |
| Communication |
|
| Data output |
Ethernet (to Facility Net software), RS-232 (to HyperTerminal), 4-20 mA |
| User interface |
4 LEDs, 2 buttons (Zero/Span Calibration |