High-purity gases are frequently needed in high-tech production operations. The HPGP 101-C offers reliable in-line contamination monitoring for process gasses at line pressure.
Control Box. Image Credit: Particle Measuring Systems
The HPGP is compatible with the majority of non-toxic gases and can be utilized in various reactive gas monitoring applications.
The PDS-E (Particle Data System - Ethernet) instrument collects and reports data that has been captured by the HPGP 101-C probe.
Source: Particle Measuring Systems
| Particle Counter |
CDA |
N2 |
Ar |
CO2 |
O2/He/Ne/H2 |
| Airnet |
Y |
Y |
N |
N |
N |
| Lasair III 110 |
Y |
Y |
N |
N |
N |
| Lasair III 310 |
Y |
Y |
Y |
N |
N |
| IsoAir 310P |
Y |
Y |
Y |
N |
N |
| IsoAir Pro-E/Plus |
Y |
Y |
Y |
Y |
N |
| Lasair Pro |
Y |
Y |
Y |
Y |
N |
| HPGP 101-C |
Y |
Y |
Y |
Y |
Y |
Benefits
- Reduced Cost
- Identify particles in gases before they affect yield
- Speed qualification of process gas distribution systems
- Compatible with hydrogen, oxygen, and the majority of non-toxic gases
- Improved Process Control
- Accurate particle sizing
- Facility Net data management software offers extensive data management, storage, reporting, and alarms
- Verify gas quality
- Detect process upsets
- Quantify the impact of system changes
- Reliable
- Passive cavity design requires infrequent maintenance
- Inert gas purge ensures safety
- When sample gas leaks into the vessel, the power to the electronics is discontinued
Features
- Parallel processing array detector system
- Safety containment vessel
- Oxygen and hydrogen compatibility
- CE and RoHS 2 compliant
- 0.1 µm sensitivity at 0.1 SCFM
- 8 particle channels
- Line pressures from 40 to 150 psig
- Passive laser cavity
Applications
- Qualification of gas distribution systems
- Process gas monitoring
- Reactive gas monitoring
Specifications
Source: Particle Measuring Systems
| HPGP 101-C |
|
| Size channels |
8 channels with thresholds at: 0.1, 0.2, 0.3, 0.5, 1.0, 2.0, 3.0, 5.0 μm |
| Sample rate |
0.1 SCFM (2.8 LPM) (=total volumetric flow rate) |
| Counting efficiency* |
> 50 % at 0.14 μm |
| Zero count level |
< 2/ft3 or < 0.2/min |
| Maximum concentration** |
3,000/ft3 |
| Laser type |
HeNe |
| Calibration |
Traceable to the US National Institute of Standards and Technology (NIST). |
| Power |
100, 115, 220 – 230, or 230 – 240 V, 50 – 60 Hz, 0.5 A |
| Environment |
Temperature: 32 – 113 °F (0 – 45 °C). Humidity: non-condensing. Maximum altitude: 9,842 ft (3,000 m). |
| Dimensions (l, w, h) |
26 x 8 x 9 in (66 x 20 x 22 cm) |
| Weight |
45 lb (20.4 kg) |
| Compliance |
CE, RoHS 2 |
| PDS-E (Data Interface) |
|
| Number of sensors |
Supports 1 HPGP unit per PDS-E |
| Sampling interval |
1 sec to 8 hr |
| Computer interface |
RS-232, bi-directional; Ethernet (via PMS protocol, Modbus, or OPC) |
| Power |
100 – 240 VAC, 50 – 60 Hz, 0.63 A |
| Environment |
Temperature: 32 – 113 °F (0 – 45 °C), Humidity: non-condensing, Maximum altitude: 9,842 ft (3,000 m) |
| Dimensions (l, w, h) |
7 x 8.5 x 12.5 in (18 x 22 x 32 cm) |
| Weight |
11.5 lb (5.2 kg) |
* Allow ± 5 % for variations in sample flow.
** Greater than 90 % accuracy (less than 10 % coincidence loss) at maximum recommendation ambient concentration.