The production of ALD-coated particles necessitates the blend of robust industry-standard material handling and advanced ALD processes. Forge Nano has dedicated the past 10 years to design and develop a range of best-in-class, most sophisticated and reliable particle ALD reactor systems.

Forge Nano uses these high quality systems on a daily basis to process development lots for its global customers and now provides this same capability to commercial customers. The CIRCE Continuous Vibrating Reactor provides an unparalleled production capacity for its size, as well as a design built for uptime and reliability.

The CIRCE offers turn-key mass production, including:

  • True completely continuous production
  • Atmospheric pressure operation
  • Almost zero moving parts
  • Scale from 100 to 4000 kg/hour
  • Product yield of 99%+

Forge Nano’s Continuous Vibrating Reactor System integrates the company’s expertise in material handling with in-depth knowledge of ALD, thus offering a reliable and powerful industrial machine.

The CIRCE system has been engineered to coat each particle with unmatched thickness and conformity control, without any aggregating particles. CIRCE has been designed to suit the product specifications of customers to improve performance and reliability. The Continuous Vibrating System allows users to increase production capacity with a smaller footprint.

Technical Specifications

Source: Forge Nano

Continuous Vibrating Reactor System Specifications
Powder Production Rates 100-4000 kg per hour (designed to specification)
Maximum Reactor Temperature 400°C
Minimum production turndown 25% of maximum capacity
Precursor Sources 2 calibrated liquid sources (selected at time of order)
Number of reactant gas zone cycles Up to 10
Process Line and Valve Temperatures Up to 200°C
Particle Handling Fluidization with fluidization software and proprietary particle handling aids
Software/Controls PLC Control Scheme, Touchscreen HMI, NEMA 4 Rated
Complete System Dimensions ~5 m x 2 m x 4 m
Optional Additions
Pre-heating Operation Continuous heating equipment for substrate feedstock
Cooling Unit Operation Continuous cooling conveyor for finished material
Bulk-bag unloader/loader Allows for processing of feedstock already bulk packaged
Bulk-Precursor Refill Station Eliminates the need for vessel exchange at the unit. Day tanks are automatically refilled from a remote bulk station
Consumables and Likely Spares Package Includes common consumables and spare parts
Regulatory Compliance NRTL Field Certification Available


It is possible to customize each CIRCE system for specific pre- and post-treatment requirements. Moreover, full-factory integration is offered for customers who wish to add new functionality to their production line. A bulk-bag to bulk-bag system is also provided for on-demand production.

Image shows material preheat and hold-up hopper for short run, pilot evaluation.

Image shows material preheat and hold-up hopper for short run, pilot evaluation. Image Credit: Forge Nano

Forge Nano has created proprietary commercial-scale and pilot-scale reactors that are currently developing ALD-coated materials for customers. These systems make low-cost coatings and are only offered to supply chain partners and joint development customers with IP licensing.

Forge Nano supports the configuration and functioning of this equipment at the advanced materials production facilities of its customers. The company’s Fortune 500 customers have endorsed the coating consistency across its pilot, research and commercial systems, which include its continuous vibrating reactor system with the ability to process more than 48,000 kg of powder each day.

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