ZEISS Axio Imager Vario-Automated and Clean Room Compatible

The ZEISS Axio Imager Vario from Carl Zeiss Microscopy enables users to examine even the smallest MEMS sensors up to XXL wafer or even complete flat planel panel displays without ruining them.

As a result of the sample height measuring up to 254 mm and lateral space of up to 300 mm, it is possible for users to analyze the widest range of samples with Axio Imager Vario.

The column design provides high stability. Users can take control of their wafers in the clean room. A motorized z-drive along with the hardware autofocus guarantees the automatic setting of the ideal focus position.

Clean Room

Users can produce semiconductors and inspect wafers in the clean rooms. Clean rooms are categorized as per the DIN EN ISO 14644-1, distinguished by the number and size of particles per m³. Axio Imager Vario has been certified as per this standard and satisfies the needs of clean room class 5.

Clean room class ISO 5 is comparable to class 100 of the former standard FED STD 209E (1992). Users can make use of the clean room kit, comprising a 7x nosepiece turret, sneeze guard and particle protection.


  • Users can benefit from the optimum sample height measuring up to 254 mm and lateral sample space up to 300 mm x 300 mm. They can select between two manual and one motorized column along with industry compliant 3-button-operation.
  • Axio Imager Vario concentrates with the nosepiece on the sample. This means that users can achieve high focusing precision and repeatability, particularly with bulky samples.
  • With Axio Imager Vario together with LSM 700, users examine sensitive samples in high resolution without contact.
  • Users can benefit from quick and accurate focusing of reflective samples with the Hardware Auto Focus, which seems to be poor on contrary.
  • Axio Imager Vario is certified as per DIN EN ISO 14644-1 and fulfills the needs of clean room class 5.

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