Explore the original OEM components from Kurt J. Lesker, including electrical parts, replacement items, and consumables.
Original OEM Parts
There are three major categories for parts:
- Electrical
- Replacement Parts
- Consumables
Available in:
- 8667, 8671, 822
- KDF 600 Series
- KDF 700 Series
- KDF 800 Series
- KDF 900 Series
- Limited MRC
Consumables
Includes shields, o-rings, bearings, heat lamps, magnets (compatible with all cathode types), pallets (standard or custom), ion tubes, and thermocouples (TCs).
Replacement Parts
Range includes INSET™ cathodes – Upsilon, Mu, Chi, and Focest*. Also available: Planar, Mark II, Magterial™, “X-series”™, and Q-Set models. Additional parts include bellows, Garlock seals, ferrofluidic feedthroughs, pallet carriers, shutter carriages and plates, RF networks, solenoids, relays, cryo pumps, compressors, grippers, gate valves, and hydraulic components such as pumps, manifolds, valves, and cylinders. Other items: air systems, grippers, valves, etch platforms, etch hoist assemblies, stainless steel roughing lines, and viewports.
*These patented cathodes are the sole property of KDF. KDF retains all rights and intellectual property associated with these cathodes.
Electrical
Available components include printed circuit boards, RF generators, flow and gas control valves, RF and DC power supplies, computer boards, I/O cards, analog racks, and pressure gauges.