SuperLIX: Ultra High Precision Thermal Expansion Measurement System

SuperLIX, an ultra-high precision thermal expansion measurement instrument, has an accuracy of 1×10^–8/K or less.

Thermal Expansion Measurement with the World-Class, Ultra-High Accuracy

Application Case

• Development of negative thermal expansion material and anode materials
• Development of standard materials
• Development of materials for actuators
• Development of zero-expansion materials

Applications

• High-precision dilatometry of materials (glasses, ceramics, metals, etc.) with a very low expansion rate, such as 10^–8/K
  • Materials that need to be extremely precise, like those used in the aerospace industries
  • Lithography system spare parts for semiconductor manufacturing
  • Materials for an extremely accurate photogram substrate
  • Spare parts of the precision stage
• Quality control of low expansion materials

Features

• The influence of the vibration disturbance can be mitigated by introducing an elimination mechanism into the system, allowing the standard analytical electronic balance (resolution 0.01 mg) to be employed in a stable environment (patent applications: 2016-058190, 058191, and 058192).
• The displacement of a sample can be measured using the laser wavelength (632.8 nm). Stray light could be avoided by integrating optical elements, which increases the signal-to-noise ratio of fringe signals. Special displacement calibration does not involve any measurements or operations
• The image sensor detects interference fringes and processes the images to determine displacement (expansion/contraction) at high resolution, even during sample measurement. Users can also look at the rate of expansion

Specifications

Source: Orton Ceramic Foundation

Utility

Source: Orton Ceramic Foundation

Measurement Example

Measurement of low-expansion ceramics. Image Credit: Orton Ceramic Foundation

Measurement of metal (super-invar). Image Credit: Orton Ceramic Foundation