These outstanding precision linear translation stages are equipped with piezo actuators that provide a step size of less than 30 nm, allowing for extremely fine controlled movements. The design of piezo actuators ensures set-and-forget stability with nearly no backlash.
MKS Newport provides a comprehensive selection of user-friendly and versatile piezo motion controllers and drivers to enhance the nanopositioning system.
Agilis™ Miniature Piezo Linear Stages
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- Down to 25 nm MIM
- Up to 48 mm strokes, open and closed loops
- Up to 10 mm/second speed
Picomotor™ Actuated Linear Stages
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- Available for vacuum and UV environments
- Extremely high position stability
- 30 nm MIM
Piezo Flexure Linear Stages
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- Open and closed loops, vacuum versions available
- High dynamic capabilities
- Sub-nm resolution