The Super Agilis™ has a piezo motor linear stage with a CONEX-SAG controller and driver, available in both closed-loop and open-loop configurations. The controller is set up and supplied, ready to control the accompanying linear stage.
- Lifetime > 10 km
- 100 nm or 25 nm (closed-loop) minimum incremental motion
- High-speed 10 mm per second travel
- Direct mounting without an additional baseplate
Specifications
Source: MKS Newport
| Models |
CONEX-SAG-LS16P |
CONEX-SAG-LS32P |
CONEX-SAG-LS48P |
| Axes of Travel |
X |
X |
X |
| Travel Range |
16 mm |
32 mm |
48 mm |
| Centered Load Capacity |
20 N |
30 N |
30 N |
| Axial Load Capacity |
2 N |
2 N |
2 N |
| Holding Force |
3 N |
3 N |
3 N |
| Maximum Speed |
10 mm/s |
10 mm/s |
10 mm/s |
Minimum Incremental
Motion1 |
25 nm |
25 nm |
25 nm |
Bidirectional
Repeatability, Typical |
120 nm (full stroke)/25 nm (scanning mode) |
120 nm (full stroke)/25 nm (scanning mode) |
120 nm (full stroke)/25 nm (canning mode) |
| Material |
Stainless Steel |
Stainless Steel |
Stainless Steel |
| Cable Length |
1.5 m |
1.5 m |
1.5 m |
| Weight |
65 g |
93 g |
127 g |
- This value is 100 nm for the Open-loop version.
Features
CONEX-SAG Motion Control
Image Credit: MKS Newport
The CONEX-SAG is a small and inexpensive single-axis motion controller. The controller has the CONEX GUI, which is easy to use and easily accessible via USB, which also provides power to the controller. It provides a closed-loop method that is a simplified form of conventional DC servo loop control, and, when paired with the linear encoder, the system has a bidirectional repeatability of 25 nm.
For in-position stability, the user can change the deadband parameter, which prevents dithering while the stage is inside a specified position tolerance. Open-loop CONEX-SAG-LS stages are also available without an encoder as a more cost-effective solution. RS232 connectivity is common for systems built after September 2025. A CONEX-SAG-RS232 Cable (available separately) is required to connect to the RS232 port.
Complete the Conex System
MKS Newport also provides the CONEX-BP base plate, which securely attaches up to 6 CONEX-AGP motion controllers, saving users space and providing convenience.
User-Friendly Interface
Image Credit: MKS Newport
The CONEX-SAG Controller can be interacted with via a graphical user interface (GUI), which allows the user to perform motions, change the controller's status, set parameters, and perform other tasks. The CONEX-SAG Controller GUI is compatible with Windows versions 7, 8, and 10.
Includes Agilis Piezo Linear Stage
Image Credit: MKS Newport
The (P) models of the linear stages of CONEX-SAG-LSxx feature a novel, small, direct-read linear encoder. While providing the sub-micron bidirectional repeatability anticipated by direct-read encoder technology, the footprint is very small.
Compact Controller and Stage
Image Credit: MKS Newport
The CONEX-SAG controller is roughly the size of a deck of cards, measuring 93 × 53 × 23 mm. A CONEX-BP baseplate can accommodate up to six controllers.
The stages are also intended to stack easily as XY stages without the need for an adaptor plate, resulting in a height of only 24 mm. Both the controller and the stage are small and compact, making them appropriate for applications with limited space or access.
Travel Range Variety
Image Credit: MKS Newport
Different linear stages are available to meet essential requirements, such as travel range, and are suitable for a wide range of applications. The linear stages are relatively tiny, like the controllers, but they can go 16, 32, and 48 mm, respectively.
All Steel Stages
Image Credit: MKS Newport
The CONEX-SAG-LSxx’s entire stainless steel body maintains a remarkable stiffness-to-weight ratio, higher thermal stability, and high load capacity.
Crossed-Roller Bearings
Image Credit: MKS Newport
Each stage has stainless steel crossed-roller bearings. Crossed-roller bearings provide all of the benefits of ball bearings, in addition to increased load capacity and rigidity.
High Speed
Image Credit: MKS Newport
Super Agilis stages are designed for quick travel, with speeds of up to 10 mm/second. This is 20 times quicker than the CONEX-AG Agilis linear stage with a piezo motor and four times faster than the CONEX-MFACC linear stage with a DC servo motor.
Angle Bracket and Base Plate
A 90 ° angle bracket and base plate can be bought separately to increase variety and mounting possibilities. The SAG-AB90-16 bracket allows vertical (Z-axis) mounting for a two-axis (XZ) assembly, while the SAG-BP1 steel base plate is intended for mounting to an optical table.