Posted in | Physical Properties Testing | Semiconductor/Wafer Metrology Tools

Vacuum Linear Stages for Precision Positioning

Vacuum Linear Stages for Precision Positioning

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Newport^TM vacuum-compatible linear translation stages provide great motion performance. Each linear stage is manufactured, processed, and tested under vacuum at 10^-6 hPa (7.5*10^-7 Torr). These stages range from nanopositioners to micropositioners and can meet the translation requirements of even the most demanding vacuum motion applications.

Vacuum Compatible Linear Stages

Source: MKS Newport

	Series	Travel Range (mm)	Minimum Incremental Motion (µm)	Normal Load Capacity (N)	Maximum Speed (mm/s)
	MTN Series Vacuum Stages MTN100PPV6 MTN200PPV6 MTN300PPV6	100–300	0.4	1000	20
	UTS Series Vacuum Linear Stages UTS50PPV6 UTS100PPV6 UTS150PPV6	50–150	0.3	100	20–40
	MFA Miniature Vacuum Linear Stages MFA-CCV6	25	0.1	50	1.25
	Agilis Series Vacuum Linear Stages AG-LS25V6 AG-LS25-27V6	12, 27	0.05	3	0.5
	NPX Vacuum Linear Stages NPX-V6	0.1–0.4	0.0002-0.008	10–100	See specifications
	Manual Vacuum Linear Stages 9066-V 9067-V	12.7, 25.4	Actuator- dependent	111, 222	Actuator-dependent

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