NewportTM motion-control devices are developed to meet the specific demands of semiconductor and LED industry applications.
With over 50 years of motion control experience and a full line of products that include linear, rotary, vertical stages, actuators, and goniometers, Newport Motion provides semiconductor equipment manufacturers with an innovative instrument that is adept at attaining the highest levels of precision and throughput for automated manufacturing and process control.
Common applications include wafer inspection, optical lithography, nanoimprint lithography, memory repair, wafer bump inspection, wafer guide direct writing, reticle inspection and repair, PCB patterning, and others.
Wafer Processing and Inspection with DynamYX Datum™. Image Credit: MKS Newport
Innovative Stage Architecture with Z-tip-tilt-theta. Image Credit: MKS Newport
LED Inspection with XY-Theta Z Assembly. Image Credit: MKS Newport
Applications
Source: MKS Newport
| Application |
Models |
| Wafer Inspection, Reticle Inspection and Repair |
DynamYX, XML350, ZVR-PP |
| Optical Lithography, Nano Imprint Lithography |
SinguLYS, GTS150, Error Mapping, ILS200LM |
| PCB Patterning and Memory Repair |
HybrYX G5, IMS1000LM, IMS300V |
| Mask Writing, Wave Guide Direct Writing |
XMS100, VP-5ZA, FMS300CC |
| LED Scribing and Inspection |
RGV100BL, Custom IMS-LM, XML210 |
| Hard Disk Drive Manufacturing |
LTA-HL, NPM140SG-D, XPS-DRVP1 |
Air Bearing Solutions - "Precision, Repeatability, and Throughput"
MKS Newport offers advanced semiconductor solutions, including the DynamYX® Datum™ with 5G acceleration and nanometer-level accuracy, the HybrYX® air and mechanical bearing “hybrid” stage, and the recently released SinguLYS® with advanced features combined in a single-axis solution.
DynamYX DATUM is designed specifically for semiconductor wafer processing, delivering unprecedented performance. The DATUM’s low-profile monolithic stage architecture and innovative ceramic construction provide excellent throughput and unrivaled performance.