The MLT Series of compact, low-profile, high-precision linear stages effectively combines the ultra-precision capabilities of the XM family with the compact design of the VP family of linear stages.
These stages exemplify MKS Newport's latest advancements and expertise in precision stage design for a range of industrial applications, while also meeting the brief setup times expected of motion products when used with MKS Newport motion controllers.
The MLT stages are particularly well-suited for standard scanning or point-to-point applications within the semiconductor, industrial, or research sectors, including metrology, sensor testing and calibration, alignment, and pick-and-place assembly.
- Sturdy aluminum body, optimized through FEM, mitigates thermal bending effects
- Precision-engineered crossed roller bearing slides ensure accurate linear motion
- Compact, low-profile design with high repeatability
- Plug and Play is compatible with ESP
- Facilitates straightforward assembly of multi-axis configurations
Compatible Controllers
Compatible motion controllers for these XM series linear motor/direct drive driven stages are:
- XPS-D Motion Controller (2-, 4-, 6-, or 8-axis): Requires a Driver Module.
- XPS-RLD Motion Controller (2- or 4-axis): Requires a Driver Module. Not compatible with XPS-RLDM (1-axis)
Specifications
Source: MKS Newport
| Models |
MLT25 |
MLT50 |
MLT100 |
MLT200 |
MLT250 |
| Travel Range |
25 mm |
50 mm |
100 mm |
200 mm |
250 mm |
| Maximum Speed |
500 mm/s |
500 mm/s |
500 mm/s |
500 mm/s |
500 mm/s |
| Minimum Incremental Motion |
5 nm |
5 nm |
5 nm |
5 nm |
5 nm |
| Maximum Acceleration |
0.75 g |
0.75 g |
0.75 g |
0.5 g |
0.5 g |
Maximum Continuous
Force |
3 N |
3 N |
3 N |
3 N |
3 N |
Centered Load
Capacity |
50 N |
70 N |
70 N |
70 N |
70 N |
| Accuracy, Guaranteed |
± 0.5 µm |
± 0.7 µm |
± 1.25 µm |
± 2.5 µm |
± 3 µm |
Bidirectional Repeatability,
Guaranteed |
± 0.15 µm |
± 0.15 µm |
± 0.15 µm |
± 0.15 µm |
± 0.15 µm |
| Flatness, Guaranteed |
± 1 µm |
± 2 µm |
± 3 µm |
± 5 µm |
± 10 µm |
| Straightness, Guaranteed |
± 1 µm |
± 2 µm |
± 3 µm |
± 5 µm |
± 5 µm |
| Pitch, Guaranteed |
± 50 µrad |
± 75 µrad |
± 75 µrad |
± 150 µrad |
± 200 µrad |
| Yaw, Guaranteed |
± 50 µrad |
± 75 µrad |
± 75 µrad |
± 125 µrad |
± 150 µrad |
| Drive Type |
Linear Motor |
Linear Motor |
Linear Motor |
Linear Motor |
Linear Motor |
| Thread Type |
M4 |
M4 |
M4 |
M4 |
M4 |
| Weight |
1.5 kg |
1.7 kg |
2.1 kg |
3.1 kg |
3.6 kg |
| MTBF |
20,000 h (100%
load, 60% duty
cycle) |
20,000 h (100%
load, 60% duty
cycle) |
20,000 h (100%
load, 60% duty
cycle) |
20,000 h (100%
load, 60% duty
cycle) |
20,000 h (100%
load, 60% duty
cycle) |
| Compliance |
RoHS 3, CE |
RoHS 3, CE |
RoHS 3, CE |
RoHS 3, CE |
RoHS 3, CE |
Features
Reliable Design
Image Credit: MKS Newport
Constructed from a robust aluminum alloy, the foundation of each MLT stage is enhanced using the finite element method (FEM) to achieve maximum rigidity and optimal thermal efficiency.
Carefully chosen components, such as long-lasting, high-load crossed-roller bearings, powerful linear motors, and precise linear encoders, are incorporated not only for their performance but also for their reliability.
Integrated limit switches are designed to prevent over-travel and collisions. Extensive testing has been performed to guarantee the high reliability and performance of the MLT.
Ironless Motor
The MLT series stages use MKS-designed ironless motors, which incorporate Hall-effect sensors and a thermistor within a compact form factor.
In contrast to iron-core motors, ironless motors offer significant benefits, including enhanced speed stability due to the absence of cogging and reduced settling time, both of which are essential for applications involving fiber alignment.
These features make ironless motors particularly advantageous in precision tasks.
XY and XYZ Configurations
Image Credit: MKS Newport
The MLT can be integrated into XY and XYZ stacks by using the existing mounting holes. A magnetic shield is necessary between the X and Y stages.
Additionally, cable chains can be provided as required. Pre-assembled XYZ stacks are offered for short travel ranges. The MLT-Z stage includes a magnetic counterweight designed to support various vertical loads while ensuring superior positioning performance.
Low Cost of Ownership
The MLT series features compact, low-profile, and rapid stages that occupy minimal space while achieving higher accelerations and speeds, thereby lowering operational costs. The design emphasizes high reliability, resulting in a lower initial investment and reduced maintenance requirements.
Plug and Play ESP Compatible
Image Credit: MKS Newport
The MLT is designed to work seamlessly with XPS series standard MKS Newport controllers that employ plug-and-play ESP technology, facilitating a straightforward startup process without the necessity for intricate driver configuration. It is important to note that for XY configurations, manual parameter adjustments are necessary.
Load Characteristics
Image Credit: MKS Newport
NOTE: Please reference MLT Manual page 5 (15 of 38) for graphs and detailed load information.
Image Credit: MKS Newport
Image Credit: MKS Newport