Automated Angular Positioning with Motorized Rotation Stages

MKS Newport motorized rotary stages offer precise and automated angular positioning suitable for wafer inspection, metrology, microrobotics, and high-precision optical applications.

Motorized rotation stages are a collection of precision positioning products developed over several decades, drawing on extensive experience delivering solutions for research, academia, industry, and the defense and homeland security sectors.

These stages are used in various applications, including semiconductor wafer inspection and scribing, metrology, micro-robotics, sensor testing, disk texturing, and optics positioning, such as polarizers and waveplates.

MKS Newport offers a selection of over 100 models, including the high-speed RGV100BL-S Rotation Stage with direct-drive and direct-read capabilities, as well as the versatile and compact CONEX-PR50CC Rotation Stage featuring an integrated controller.

Both metric and vacuum versions are available, and upon request, designs for multiple axes, OEM, or custom solutions can be provided.

Stepper motor rotation stages

Stepper Motor Rotation Stages. Image Credit: MKS Newport

DC motor rotation stages

DC Motor Rotation Stages. Image Credit: MKS Newport

Brushless DC motor rotation stages

Brushless DC Motor Rotation Stages. Image Credit: MKS Newport

Direct-drive rotation stages

Direct Drive Rotation Stages. Image Credit: MKS Newport

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