The most recent addition to the MKS NewportTM line of air-bearing products is the HybrYX® single-plane XY hybrid stage, which provides the benefits of a single-plane air-bearing stage at a significantly reduced cost compared to earlier models.
The HybrYX-HD with DynaQuiet™ - Soft Isolation System is well-suited for semiconductor wafer processing systems and is also a good choice for large substrate inspection and processing equipment.
Without compromising stability at the point of interest or creating floor vibrations, the DynaQuiet™ option enables the system to run at higher speeds and accelerations (High Dynamic).
- Designed for scanning applications that need minimal dynamic following error and ultra-low velocity ripple
- Outstanding cost-performance ratio for demanding OEM industrial applications
- True single-plane XY architecture with Z-Tip-Tilt and optional theta solutions
- Long-lasting, dependable performance ideal for high-duty cycle settings
- Acceleration of 5 g on the Y axis and scanning speeds of up to 2 m/second
- Large XY travel range (> 1 meter)
Specifications
Source: MKS Newport
| |
|
| Motorized Axes |
XY |
| Travel Range |
X: 500 mm
Y: 320 mm |
| Maximum Speed |
X: 1500 mm/second
Y: 2000 mm/second |
| Maximum Acceleration |
X: 1.5 g
Y: 5 g |
| Centered Load Capacity |
5 kg |
| Pitch, Typical |
< 15 µrad |
| Yaw, Typical |
< 15 µrad |
| MTBF |
> 40,000 hours (25% load, 30% duty cycle) |
Features
Soft Isolation System: Active Motion Compensation and Vibration Isolation
HybrYX Single Plane XY Hybrid Stages
Video Credit: MKS Newport
The patented Soft Isolation System is intended for applications such as optical lithography or wafer inspection that necessitate rapid movement between points of interest with low settling time, while decreasing vibration on the production floor. Four Soft Isolation modules are part of the system: one for each granite base corner.
The granite can move in response to stage acceleration, thanks to the elastic elastomer mounts that separate it from the frame. To quantify movement between the granite and the frame, one Soft Isolation module has "absolute encoders" in both X and Y. The stage features two encoders in X (one for each end of the gantry) and one encoder in Y.
The stage may actively compensate for granite movement and maintain a steady position at the "point of interest" using a Position Control Loop. Any stage-acceleration vibration (VC-C) transferred to the factory floor is significantly reduced by the Soft Isolation System. High acceleration and throughput are possible with this technique without causing subfloor vibrations.
Innovative Architecture
HybrYX® stages provide a potent combination of throughput, precision, and value by combining the affordability of mechanical bearings with the accuracy of a single-plane air-bearing carriage.
A unique pressure-vacuum air bearing design allows a ceramic/aluminum carriage to move freely in X and Y on a precision-lapped granite reference plane. A stiff and lightweight SiC ceramic beam guides the XY carriage along the Y-axis, and it is pressure-pressure guided on the beam.
Recirculating ball-bearing carriages support and guide the beam at both ends, producing a low-profile design that is incredibly robust, well-damped, and capable of rapid and accurate point-to-point movements as well as outstanding high-speed scanning capabilities. For crucial applications, this design also offers remarkably high Z stiffness/stability.
Image Credit: MKS Newport
Silicon Carbide Components
SiC has the unique benefit of being more rigid than any other material used in precise motion applications, including steel and aluminum. Its density is comparable to that of granite and aluminum. SiC has a sixfold lower thermal conductivity than aluminum. However, compared to granite, it has a lower thermal expansion coefficient.
Since SiC is lightweight and rigid, it can move and stop at higher accelerations. It also improves precision and repeatability because it is less sensitive to temperature variations. Position stability is another quantifiable advantage of SiC.
The HybrYX-HD Stage Applications
- Fiducial and Barcode Generation
- Automated Optical Inspection
- Wafer Bump Inspection
- Wave Guide Direct Writing
- Color Filter Generation
- Wafer Inspection
- PCB Patterning
- Laser Annealing
- Array Repair
- Array Checking
- Optical Calibration
- Scribing
- Edge Isolation