UVISEL Plus: FUV to NIR Spectroscopic Ellipsometer

The Uvisel Plus is the latest Spectroscopic Ellipsometer from HORIBA. It offers the best combination of modularity and performance for advanced thin film, surface and interface characterization.

The UVISEL Plus includes FastAcq, the newest acquisition technology designed to measure faster and more accurately than ever. It uses on double modulation and enables a sample measurement from 190 nm to 2100 nm in 3 minutes at high resolution.

Based on High Frequency Phase Modulation technology (50 kHz), the UVISEL Plus provides a powerful optical design for a standard continuous coverage from 190 to 920 nm and up to 2100 nm with the optional NIR extension. It delivers high quality data across the spectral range offering high accuracy, high resolution and excellent signal-to-noise ratio. The various fields of application include Photovoltaics, Microelectronics, Optoelectronics, Optical coatings, Nanotechnology, Flat panel display, Biochemistry, Metallurgy…

In contrast to traditional ellipsometers using rotating elements, the Uvisel Plus offers high precision and sensitivity for the characterization of very thin films, close-index materials and it can also characterize thick layers of up to 30 µm.

The Uvisel Plus’ modular design allows the instrument to be utilized for roll-to-roll machines, in-situ integration on process chambers, or as a benchtop metrology tool. 

Key Features

Product features of the Uvisel Plus Spectroscopic Ellipsometer are:

  • Modular design for ex-situ, in-situ and roll-to-roll applications
  • Extended spectral range from 190 to 2100 nm
  • High precision and sensitivity with Photo-Elastic Modulator technology
  • Completely integrated software package for modeling, measurement and automatic operations

Data Obtained

The data obtained using the Uvisel Plus Spectroscopic Ellipsometer are:

  • Surface and interface roughness
  • Thin film thickness ranges between 1Å and 30 µm
  • Optical constants (n,k) for graded, isotropic and anisotropic films v
  • Derived optical data like optical bandgap Eg, absorption coefficient a,
  • Material properties: compound alloy porosity, composition, morphology, crystallinity and more
  • Depolarization
  • Mueller matrix
     

 

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