Optical MicroGauge for High Speed (60Hz) Thickness Measurement - C11011-01

The C11011-01 Optical MicroGauge Thickness measurement system available from Hamamatsu is a film thickness measurement system that utilizes laser interferometry. It is relevant to in-line measurement in production. Additionally, an optional mapping system is available to measure the thickness distribution of a specified specimen.

The C11011-01 can be used in many applications from product manufacture process monitoring to quality control.

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Key Features

  • High speed measurement at 60 Hz
  • Measurement of pattern-formed wafer or wafers with protective film
  • Measurement of non-transparent (white color) sample by infrared photometry
  • Long working distance
  • External control is provided
  • Mapping operation

Applications

  • Film – Highly functional films are increasingly becoming important in advanced industries that deal with liquid crystal displays, solar panels, and rechargeable batteries. To improve the productivity and performance of these products, Hamamatsu provides a complete range of inspection and testing equipment.
  • Semiconductor – The Optical Gauge series is applied in many manufacturing procedures of semiconductor devices where processes are progressively more miniaturized, and metal wiring is more multilayered, along with lower voltage. This adds to enhancements in the yield and reduces the time needed to begin processes.
  • Touch panel – Even though there are many detection schemes for touch panels, the resistive film manufacturing procedure is applied here as an example to indicate the way in which the Optical Gauge series is used in such a procedure.
  • PV – Solar power generation is growing continuously into a sector aiming for the decrease of greenhouse gas emissions and other attributes. Additionally, several companies are involved in research for enhancing the conversion efficiency of modules used in power generation or in the solar cell. The Optical Gauge series can be applied in many processes in the manufacture of solar cell or modules.
  • FPD – The Optical Gauge series can be used in a number of processes in the manufacture of flat-panel displays (FPD), such as VFD fluorescent display tubes, LED, organic EL, liquid crystal, and plasma displays.

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