SERVOPRO NanoChrome Gas Analyzer

The NanoChrome provides ultra-trace measurements of ultra-high purity (UHP) gases.

By integrating cutting-edge advancements in gas sensing and signal processing techniques, the NanoChrome transforms ultra-trace purity measurements within the semiconductor sector.

• It is the ultimate solution for UHP gas monitoring applications
• A solution without compromises
• Easy maintenance and lower ongoing expenses

Overview

Reliable UHP Monitoring

The NanoChrome analyzer, designed for semiconductor manufacturing, provides reliable monitoring of argon (Ar), methane (CH₄), carbon monoxide (CO), carbon dioxide (CO₂), hydrogen (H₂), nitrogen (N₂), and non-methane hydrocarbons (NMHC) in a variety of background gases, including Ar, H₂, helium (He), N₂, and oxygen (O₂).

The NanoChrome has been updated with a larger display and the most recent software. It employs a sophisticated Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both of which were specifically created by Servomex.

High-Performance at a Lower Cost

NanoChrome's sensing technique has significant benefits over existing Flame Ionization Detector (FID) and Reduction Gas Detection (RGD) sensing technologies in terms of performance, stability, safety, and potential to minimize ongoing expenses.

Servomex’s advanced signal recovery applies patented ProPeak filtering techniques to provide highly sensitive and selective measurements that can be relied upon. With no requirement for a methanizer or flammable fuel gas, the NanoChrome also offers significant cost benefits.

The Definitive Solution for UHP Gas Monitoring Applications

When monitoring UHP gases used in semiconductor wafer manufacturing, maximum sensitivity and performance are required. A good analytical solution must be capable of monitoring all essential gases in common background gases while maintaining perfect selectivity and accuracy at ultra-trace levels.

Whatever the application requirements are, users will want a solution that can help them save money in the long run while also maximizing company efficiency. There is no need for users to make compromises.

A No-Compromise Solution

Image Credit: Servomex

The NanoChrome analyzer is a game-changer, offering the greatest degree of performance precision and selectivity currently available. This device's proprietary PED-sensing technology offers significant benefits over traditional analysis methodologies.

Not only is it very specific to the gases being measured in various gas streams, but it also eliminates the requirement for dangerous fuel gas, allowing the NanoChrome to provide an improved safety solution. NanoChrome can be used in conjunction with the DF-500 (ultra-trace ppt O₂) and DF-700 (ultra-trace moisture) analyzer series to provide a full, standalone solution.

Simple Maintenance and Reduced Ongoing Costs

NanoChrome extends calibration periods by integrating Servomex's specifically designed non-depleting PED technology with innovative new processing and operating software, therefore significantly lowering ongoing expenses during the product's life.

Features and Benefits

The Highest Reliability for UHP Gas Monitoring

The groundbreaking NanoChrome delivers significant benefits to the semiconductor industry, whether as a standalone device or as part of Servomex's comprehensive solution for UHP gases.

Benchmark Compliance

The NanoChrome is compliant with Low Voltage, EMC, and applicable Directives.

PED Sensor Technology

The highly sensitive Plasma Emission Detector removes the need for FID or RGD detectors, eliminating their associated safety concerns and high ownership costs.

Integrated Computer With Advanced Software

Each analyzer features proprietary ProPeak software and a robust Windows 10–based operating system to enhance security and stability. A fully automated system, combined with a large display screen, simplifies operation.

Unrivalled Performance

• Revolutionary high-sensitivity Plasma Emission Detector (PED) offers ultra-trace measurements of Ar, N₂, H₂, CH₄, CO, CO₂, and NMHC
• ProPeak's peak detection method allows remarkable measurement sensitivity
• The Direct Analysis Methodology reduces errors from FID and RGD measurements

Flexible

• A comprehensive solution for ultra-trace H₂, CH₄, CO, CO₂, N₂, Ar, and NMHC in a wide spectrum of common background gases, including He, H₂, N₂, Ar, and O₂
• Combined with DF-500 analyzers for trace O₂ and DF-700 analyzers for trace moisture, this system provides a comprehensive stand-alone UHP gas analysis
• Digital communications for remote access: Internet/Ethernet and RS232

Easy to Use

• Extensive report monitoring software provides complete access to chromatograms, process outcomes, statistics, and historical data
• Internal dilution system option
• No need for combustible fuel gas, which enhances safety and simplifies installation

Low Cost of Ownership

• Non-depleting sensors and clever software lengthen calibration periods
• There is no requirement for methaniser or consumable fuel gas
• Cost-effective and simplified ongoing maintenance

Benchmark Compliance

• In compliance with Low Voltage, EMC, and applicable Directives

Specifications

The NanoChrome detects the gases listed below in typical background gases at ultra-trace levels, ensuring the greatest purity monitoring dependability.

Source: Servomex

Technologies

• Gas Chromatography
• Plasma

Certifications

• In compliance with EMC Directives, rated for Overvoltage Category II and Pollution Degree 2

Schematic

Image Credit: Servomex

Size

482 mm (18.9”) Wide × 117 mm (4.6”) High × 600 mm (23.6”) Deep

Weight

11–27 kg (25-60 lb) applications dependent

Typical Applications

The NanoChrome provides precise and dependable gas analysis for applications and processes across a wide range of industries, including UHP gas and semiconductor applications.