ULTRA Series of ultra-high-purity gas analyzers meet the rigorous requirements of the semiconductor industry, delivering outstanding measurement performance.
Employing established technology, they function reliably at a notably lower cost of ownership than rival technologies.
Proven Sensor Technology
The ULTRA Series employs reliable Servomex sensing technologies that provide established dependability, user-friendly operation, and necessitate minimal maintenance.
Coulometric
Measure O2 Down to 45 ppt with Coulometric Sensing
The ULTRA Series features a highly sensitive, non-depleting Coulometric sensor that provides the best measurement of oxygen in the industry, eliminating the necessity for periodic replacements and the inaccurate low readings commonly linked to fuel cell sensors.
Tunable Diode Laser
Measure H2O Down to 55 ppt with Laser Moisture Sensing
Utilizing the cutting-edge Tunable Diode Laser (TDL) Spectroscopy technology, the Laser Moisture sensor provides exceptional non-contact measurement capabilities within a durable and straightforward, low-maintenance optical framework.
Plasma
Measure Multiple Gases Down to 100-500 ppt with Plasma
The Plasma Emission Detector technology provides a stable, highly sensitive measurement system capable of detecting trace amounts at parts-per-billion levels. It has been demonstrated to satisfy UHP gas standards, all while being significantly more cost-effective than alternative technologies.
Go ULTRA for Pure and Simple Benefits
Providing rapid response times, minimal detection levels, and user-friendly operation at a more affordable price compared to rival systems, the ULTRA Series stands out as the optimal selection for UHP gas analysis.
Highly Stable and Cost-Effective
The sensing technologies employed throughout the ULTRA Series are non-depleting and have been shown to be effective. Servomex provide precise, dependable measurements at a far cheaper cost than rival technologies such as APIMS, thanks to their deep industry experience. Each sensor delivers specialized, high-sensitivity monitoring for the gas of interest while maintaining uncompromising stability and responding quickly to changing gas concentrations.
No-Compromise Performance
When monitoring the ultra-high-purity (UHP) gases used in semiconductor wafer manufacturing, maximum sensitivity and performance are required. Each of the ULTRA Series analyzers has the best Lower Detection Limit (LDL) in the product line. Together, they offer a game-changing, comprehensive UHP gas analysis system that is dependable, simple to use, and much less expensive than rival technologies.
Easy to Use and Maintain
The ULTRA Series provides a comprehensive, value-added solution for the semiconductor industry, combining great performance with low cost. The non-depleting sensors require less maintenance and have longer calibration intervals, which contribute to their low cost of ownership. Each analyzer is simple to operate, decreasing the requirement for training and significantly lowering the likelihood of operator mistakes.
Explore the ULTRA Series Product Range
DF-560E ULTRA
The DF-560E ULTRA Delivers Industry-Leading Ultra-Trace Oxygen Detection
Image Credit: Servomex
The front screen now shows the remarkable Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt) attained by the DF-560E ULTRA. The semiconductor industry receives industry-best oxygen (O2) readings for quality control in ultra-high-purity (UHP) electronic grade gas when the DF-560E ULTRA automatically converts to ppt once the measurement is below 1 ppb. It is versatile, able to log data in a variety of formats while monitoring O2 in several background gases.
DF-750 ULTRA
The DF-750 ULTRA is the First Choice in Moisture Analysis for the Semiconductor Industry
Image Credit: Servomex
The DF-750 ULTRA is intended for 300mm semiconductor factories and is especially designed to measure trace and ultra-trace moisture in a variety of UHP gases. The electronics-grade gases nitrogen, hydrogen, helium, argon, and oxygen are measured for moisture contamination.
The industry-leading 55 parts-per-trillion (ppt) Lower Detection Limit (LDL) provided by Tunable Diode Laser (TDL) sensor technology guarantees that the DF-750 ULTRA's reliable, very accurate readings satisfy the exact monitoring requirements of semiconductor manufacturing.
DF-760E ULTRA
The DF-760E ULTRA is a Dual Moisture/Oxygen Analyzer for UHP Gases
Image Credit: Servomex
The compact DF-760E ULTRA analyzer is an excellent option for the dual measurement of trace and ultra-trace moisture (H2O) and oxygen (O2), providing industry-leading quality control readings for UHP bulk gases. The DF-760E ULTRA measures ultra-low contaminant levels of H2O and O2 in background gas blends of nitrogen (N2), hydrogen (H2), helium (He), O2, and argon (Ar) (H2O in O2 only). This compact unit combines the robust Tunable Diode Laser (TDL) technology with the non-depleting Coulometric sensor.
NanoChrome ULTRA
The NanoChrome ULTRA Delivers Superior Ultra-Trace Measurements of UHP Gases
Image Credit: Servomex
The cutting-edge NanoChrome ULTRA, the semiconductor industry's top choice for ultra-trace purity measurements, combines the latest advances in gas sensing and signal processing for exceptional performance.
It provides the most reliable monitoring of argon, methane, carbon monoxide, carbon dioxide, hydrogen, nitrogen, and non-methane hydrocarbons in a variety of common background gases using sophisticated Plasma Emission Detector (PED) sensing and sensitive ProPeak software.