These Mass flow meters are exceptionally versatile due to the highly responsive, multivariate laminar DP (differential pressure) technology. Built to spec with a variety of options to accomodate varying pressure ranges, flow rates, wetted materials or other process requirements.
- Complete with Limited Lifetime Warranty
- Features a measurement range as wide as 0.01-100 % (10,000:1 turndown)
- This technology measures mass flow, volumetric flow, temperature, and pressure
- Laminar DP technology for for fast, high resolution mass flow measurement
- Offers 98+ standard pre-calibrated gas options that allow for switching without any loss of accuracy
Full Scale Flow Ranges
0.5 SCCM – 12,000 SLPM
Operating Pressure Range
11.5 – 320 PSIA
M Series Meter
For most gas measurement
Most versatile

Image Credit: Alicat Scientific, Inc.
- 11.5-160 PSIA operational range
- 0.5 SCCM-12,000 SLPM alternatives
- Accuracy can be as precise as ± 0.5 % of the measurement
- ± (0.1 % of the measurement + 0.02 % of the full scale) for repeatability
MQ Series Meter
Measure flow rates at higher pressures
Highest pressure rating

Image Credit: Alicat Scientific, Inc.
- ± 0.1 % of full-scale repeatability
- 11.5 -320 PSIA operational range
- 10 SCCM-12,000 SLPM alternatives
- Precision can be as high as ± 0.6 % of the reading or ± 0.1 % of the full scale, depending on which value is greater
MS Series Meter
For a wider range of gases
Corrosion-Resistant Wetted materials

Image Credit: Alicat Scientific, Inc.
- 11.5 – 160 PSIA
- 0.5 SCCM – 12,000 SLPM
- 130 gases, including corrosives
- ± 0.4 % of the reading and ± 0.2 % of the full scale accuracy
BIO Series Meter
Measure gases into and out of bioreactors + fermenters
ASME BPE compliant

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- Long-term stability
- Engineered for scalability (10,000:1 operating range)
- Durable, compliant materials such as USP Class VI or USPVI elastomers
- Additionally employs laminar differential pressure mass flow meter technology
Available Variants
MW Series Meter
The MW Series Meters are low-pressure drop laminar DP mass flow meters.
Build Options for Laminar Differential Pressure Mass Flow Meters
Source: Alicat Scientific, Inc.
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| Communication Protocols |
RS-232 Serial (default) RS-485 Serial Analog (4-20 mA, 0-10 Vdc, 0-5 Vdc, or 1-5 Vdc) Modbus RTU (over RS-232 or RS-485) Modbus TCP/IP DeviceNet EtherCAT EtherNet/IP PROFIBUS PROFINET IO-Link |
| Displays |
Backlit monochrome (default) or TFT color; integrated or panel-mount; none |
| Process Connections |
10-32, NPT, SAE, BSPP, VCRM, VCO, Compression |
| Ingress Protection |
IP40 (default); IP66, IP67 |
| Hazardous Environment Ratings |
CSA Class 1 Div 2, ATEX Class 1 Zone 2; uses Legacy – 8v firmware (2020) manual For explosive environments, see IS-Max Series |
| Humid Gases |
Relative humidity compensation |
| Measurement Technology |
Laminar differential pressure (laminar DP) flow sensing with temperature and pressure correction. |