The MC Series Mass Flow Controllers With Laminar DP Technology

MC gas flow controllers use laminar differential pressure technology to measure flow rates faster and more precisely than other methods. Features multivariate reporting & easy control using backlit display or analog/digital communication protocols. They offer high performance & steady flow using an integrated proportional valve for ultra-fast control response. 

• Laminar DP (differential pressure) mass flow measurement technology
• Instant accuracy with no warmup
• Ultra-fast control response time as low as 30 ms
• Measures mass flow, volumetric flow, temperature, and pressure
• 98-130 pre-loaded gas calibrations - switch without losing accuracy
• Measurement and control range as high as 0.01 – 100 % (10,000:1 turndown)
• Limited Lifetime Warranty

Full Scale Flow Ranges

0.5 SCCM-12,000 SLPM

Operating Pressure Range

11.5-160 PSIA

MC Series Controller

Alicat’s flagship controller

Fast proportional control

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• 11.5-160 PSIA operating
• As fast as 30 ms control response
• 0.01-100 % control range (10,000:1 turndown)
• 0.5 SCCM full scale to 12,000 SLPM full scale options
• Accuracy as precise as ± 0.5 % of the reading or ± 0.1 % of the full scale, depending on which value is greater

MCS Series Controller

Corrosion-resistant flow control

Reduced Wetted Materials

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• Control range spans from 1 % to 100 % of the full scale
• Up to 130 calibrations for both corrosive and non-corrosive gases are preloaded
• 0.5 SCCM full scale to 12,000 SLPM full scale options are available
• The accuracy can reach ± 0.4 % of the reading and ± 0.2 % of the full scale

MCQ Series Controller

Control gas flow at higher pressures

Highest pressure rating

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Accuracy as precise as ± 0.6 % of the reading or ± 0.1 % of the full scale, depending on which value is greater10 SCCM full scale – 12,000 SLPM full scale options.

• 11.5-320 PSIA operating
• 100 ms control response
• 0.5-100 % of full-scale control (200:1 turndown)

MCD Series Controller

Control flow in two directions

Bidirectional Flow Control

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Accuracy as precise as ± 0.5 % of the reading or ± 0.1 % of the full scale, depending on which is greater

• 11.5 - operating at 160 PSIA
• 0.5 SCCM full scale - options for 3,000 SLPM full scale
• Reference specifications for MC, corrosion-resistant MCS, low-pressure drop MCW, or high-pressure MCQ. While performance remains consistent, dimensions will vary with the inclusion of a valve.

MCT Series Controller

Switch between two gas streams

Two Sources, One Device

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Accuracy as precise as ± 0.5 % of the reading or ± 0.1 % of the full scale, depending on which is greater

• 0.5 SCCM full scale - options available up to 3,000 SLPM full scale
• Operating range of 11.5 - 160 PSIA
• Reference specifications for MC, corrosion-resistant MCS, low-pressure drop MCW, or high-pressure MCQ. While performance remains consistent, dimensions will vary with the inclusion of a valve.

Available Variants

MCW / MCWD Series Controller

The MCW/MCWD Series Controllers are low-pressure-drop laminar DP MFCs.

SFF / MCV Series Controller

Control gas under vacuum pressures, SEMI footprint choices.

IS-Max Series Controller

Intrinsically safe MFC for explosive atmospheres.

Build Options

Source: Alicat Scientific, Inc.