Microspot XRF Analyzers - FT160

The FT160 from Hitachi High-Tech is a state-of-the-art microspot and ultra-thin coatings analyzer designed for next-generation miniaturized electronics.

The FT160 XRF analyzer helps users to maintain accurate and consistent coatings on micro-connectors, PCBs, and semiconductor wafers, quantifying even the smallest features with reliability and accuracy.

Built to analyze microspot and ultra-thin coatings, the optics and detector technology of the FT160 are enhanced for the smallest of features.

Users can Do More with the FT160

High-intensity X-ray: A new polycapillary optic system is the central component of the instrument that has a 30 μm beam ideal for ultra-small components and minute semiconductor patterns.

High-sensitivity SDD detector: This high-performance unit doubles the count rate, thereby increasing productivity.

HD camera: Better resolution of the observation camera — with 16x digital zoom — makes PCB and semiconductor surfaces simple to navigate and easy to view.

Smart controller software: It is possible to program the FT160 to automatically identify measurement locations, based on pattern and shape, thus boosting accuracy and throughput.

Precision Analysis

The precision of the positioning stage and polycapillary X-ray optic allow users to measure nanometer-scale coatings on features that measure <50 µm.


The new high-intensity polycapillary optic and enhanced SDD detector equipped within the FT160 enable the throughput of the instrument to be doubled compared to traditional devices.


It is easy to load and remove parts through the large door, and a big sample table houses components with a broad range of sizes and shapes.


The sturdy chassis has been engineered and tested for durability in a complex production or laboratory setting.

The Ideal Analyzer for Present-Day Electronics Manufacturers

The robust features of the FT160 make it the preferred instrument for labs with a heavy workload where versatility, accuracy, and efficiency are vital to maintain workflow.

The FT160 provides:

  • Measurement of features measuring <50 µm
  • Quick results and ease of use to ensure high throughput
  • A large sample observation window to allow viewing of test
  • A large door and stage for fast sample arrangement
  • Polycapillary optics and a high-sensitivity SDD detector for excellent accuracy

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