X’Pert³ MRD XL Automation

As an additional software solution for Malvern Panalytical's X’Pert3 MRD XL tool, automation can be integrated into any existing instrument to give SECS/GEM-compliant host control.

Using these new capabilities, the MRD XL system can now demonstrate its modularity and flexibility in a host-controlled fab environment.

This makes it possible to guarantee a contaminant-free environment for production or research.

MRD XL Automation brings SECS/GEM functionality to Malvern Panalytical's most advanced wafer analysis instrument, enabling cleaner, faster, and more efficient semiconductor processing.

This software enables automated wafer analysis across the board, from wafer selection to measurement to results distribution, with regular bilateral communication between the host computer and the equipment using the widely used SECS/GEM protocols.

A fully automated approach eliminates the requirement for direct human intervention and provides faster and more effective analysis. Since humans are the main source of contamination in wafer analysis, having this capability is extremely helpful in ensuring a cleaner production or research environment.

Features and Benefits

  • Advanced automotive capabilities

X’Pert³ MRD XL Automation

Image Credit: Malvern Panalytical

  • Fully customizable options

X’Pert³ MRD XL Automation

Image Credit: Malvern Panalytical

  • Future-proofed functionality

X’Pert³ MRD XL Automation

Image Credit: Malvern Panalytical

  • Modular approach

X’Pert³ MRD XL Automation

Image Credit: Malvern Panalytical

  • Long service lifetime

X’Pert³ MRD XL Automation

Image Credit: Malvern Panalytical

Advanced Automotive Capabilities

Wafer analysis can be effectively automated with the help of the MRD XL Automation program, negating the need for human intervention.

Fully Customizable Options

The framework of the MRD XL Automation program is completely adjustable, allowing the configuration to be adapted to suit any individual needs.

Future-Proofed Functionality

MRD XL Automation enables user operations to keep up with the rapid industry growth since automation is at the forefront of semiconductor innovation.

Modular Approach

The X’Pert3 MRD XL is a modular system. The diversity of the tools and functionalities that it offers makes it simple to customize according to the needs of the user’s business. This all-in-one strategy means that users do not need to invest as much money in new instruments.

Long Service Lifetime

As a result of the high-quality support and service provided by the MRD XL instrument, this tool will grow alongside any users’ operations.


Malvern Panalytical provides various services to ensure that its user's instruments are constantly in excellent condition and operating at peak efficiency. From its service engineers to its global customer support network, Malvern Panalytical is always there to provide advice, help, and technical support.

  • Field-based parts replacement and alignment
  • A global network of customer service

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