| Title: |
Suss Microtec Vacuum Probe System PAV150 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Süss Microtec Test S |
Model | PAV150 |
Description | Semiautomatic Vacuum Probe Station |
Wafer Size Range |
|
Maximum | 150 mm |
Set Size | 100 mm |
Accessories | Pfeiffer Turbo Pump: TC 600
Varian Scroll Pump: PTS06001UNIV
Pfeiffer
Chiller: T2K400
Boeckeler Video Measurement System: VIA-100
Viewing objective:
Mitutoyo M plan APO 10x/0.28, F=200
Loading tool and substrate carrier for 100mm
substrate
Software:
Operating System: Windows 2000 Professional, Windows Embedded NT,
Windows NT 4.0 Control PC Software: Cryo/Kernel Software version 1.06IPC Software:
Cryo Special Software, version 5.06.3
|
Other Information | Vacuum Stage:
Travel Range X,Y,& Z: X=150 mm, Y=150mm, Z=12 mm, and Theta
= +/- 6°Accuracy: +10um(44 points of 150 mm cycle area)Repeatability: +/- 5
umResolution 1 um
Vacuum chamber:
Vacuum: Up to 5 x 10-5 mbarChamber heater:
Up to 70°C
Microscope Stage:
Travel range: 50 mm x 50 mm x 110 mm
Facilities
Requirements:
Compressed air: 4-6 barNitrogen: 4 bar, consumption about 160 l per
cycle
|
Extended
Description | Details at PAV150 data sheet.pdf |
Year of Manufacture | 2003 |
Power
Requirements | 240 V 20.0 A 60 Hz 1 Phase |
CE Marked | YES |
Exterior
Dimensions |
|
Width | 157.480 in (400.0 cm) |
Depth | 110.236 in (280.0 cm) |
Height | 70.866 in (180.0 cm) |
Weight | 2,000 lb (907 kg) |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |