| Title: |
Brooks Automation Vacuum Cluster Tool GX6000 |
| Company: |
Capovani Brothers Inc. |
| Location: |
Scotia, NY, USA |
| Email: |
cbi@capovani.com |
|
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|
| Description: |
|  |
Manufacturer | Brooks Automation |
Model | GX6000 |
Description | Vacuum Cluster Integration Platform |
Cassette to Cassette | YES |
Other
Information | Brooks Reliance ATR Series Robot
Model:
017-0266-01.Options: 017-250-01, 017-0251-01, 017-0253-01, 017-0255-01,
017-0185-01,017-0303-01, 017-257-01, 2-0093, 2-0086.
Brooks Wafer Aligner:
P/N:
002-7391-08
Brooks MagnaTran 7 Vacuum RobotModel: 003-1600-32
|
CE Marked | YES |
Number of Photoresist
Coat Stations | 1 |
Wafer Edge Bead Removal | YES |
|
| Close Date: |
March 30, 2015 |
| Phone: |
Capovani Brothers Inc. / +1 (518) 346-8347 |
| Email: |
cbi@capovani.com |