JEOL EDS Microanalysis System

JEOL is a top manufacturer of Energy Dispersive Spectroscopy (EDS) detectors for electron microscopy.

Their analytical model SEMs have a fully integrated JEOL EDS microanalysis system with extensive capabilities. From tabletop SEMs to the highest-resolution FE SEMs, JEOL offers EDS spectrometers custom-designed for each JEOL Scanning Electron Microscope model, ensuring optimal integration and performance.

JEOL's analytical SEM allows users to monitor the EDS spectrum in real time while looking for areas of interest in the sample. In the Standard EDS software package, users can conduct Live Analysis, high-resolution spectral mapping, quantitative mapping, drift compensation, line scans, and collect large area montage maps.

Elements from Be to U can be detected with the JEOL integrated EDS detector. Generally speaking, detection limits are ≥0.1 % (1000 ppm) for higher atomic number elements and ≥1 % for low atomic number elements (F to Be).

JEOL’s Advanced EDS Package (Standard on IT510/IT710/IT810 Series of SEMs) Offers:

  • Qbase: A user-created spectra library with search and match capabilities
  • Playback analysis: Enabling time-resolved Hyperspectral mapping
  • Quantification with standards (not available on the NeoScope)
  • EDS detector sizes range from 25 mm2 to 100 mm2
  • Dual EDS capability can be configured with optional Gather-X, the Windowless EDS

Designed by JEOL Exclusively for JEOL SEMs

These SEMS models are compatible with JEOL's embedded EDS detector:

  • JCM-7000 NeoScope
  • JSM-IT210 SEM
  • JSM-IT510 SEM
  • JSM-IT710HR FESEM
  • JSM-IT810 FESEM

JEOL’s new Gather-X windowless EDS detector, designed specifically for the JSM-IT800 Field Emission SEM, provides increased sensitivity and low-energy X-Ray detection down to Lithium.

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